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US 10,256,437 B2Granted
Barrier film, organic el device, flexible substrate, and method for manufacturing barrier film
AssigneePanasonic Corporation
InventorYuka Isaji
Life of this patent
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Abstract
A barrier film that contains primarily silicon nitride has a total hydrogen concentration of 3×1022 atoms/cm3 or higher and a silicon-bonded hydrogen concentration proportion of 40% or higher, the total hydrogen concentration indicating a total of a concentration of hydrogen bonded to silicon and a concentration of hydrogen bonded to nitrogen, and the silicon-bonded hydrogen concentration proportion indicating a proportion of the concentration of hydrogen bonded to silicon to the total hydrogen concentration.
Claims14
An organic EL device comprising:
- a first barrier film that contains primarily silicon nitride;
- a second barrier film that contains primarily silicon nitride;
- an organic EL element that is disposed between the first barrier film and the second barrier film;
- a first flexible substrate that is disposed opposite the organic EL element with the first barrier film interposed therebetween;
- a second flexible substrate that is disposed opposite the organic EL element with the second barrier film interposed therebetween;
- and
- a third barrier film that is disposed between the second barrier film and the organic EL element, and contains primarily silicon nitride, wherein
- a side end portion of the second barrier film and a side end portion of the third barrier film are located closer to the organic EL element than a side end portion of the first barrier film.
5 more elements
An organic EL device comprising:
- a first barrier film that contains primarily silicon nitride;
- a second barrier film that contains primarily silicon nitride;
- an organic EL element that is disposed between the first barrier film and the second barrier film;
- a first flexible substrate that is disposed opposite the organic EL element with the first barrier film interposed therebetween;
- a second flexible substrate that is disposed opposite the organic EL element with the second barrier film interposed therebetween;
- a third barrier film that is disposed between the second barrier film and the organic EL element, directly contacts with the first barrier film at a portion of the third barrier film, and contains primarily silicon nitride;
- and
- a resin layer that is disposed at a position distant from the organic EL element than the portion of the third barrier film, and directly contacts with both of the first barrier film and the third barrier film.
5 more elements
Dependencies are inferred from the claim text.