Nonvolatile memory device and method for fabricating the same
AssigneeSK hynix Inc.
InventorsEun-Seok Choi, Sa-Yong Shim, In-Hey Lee, Sung-Wook Jung, Jung-Seok Oh
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AssigneeSK hynix Inc.
InventorsEun-Seok Choi, Sa-Yong Shim, In-Hey Lee, Sung-Wook Jung, Jung-Seok Oh
Estimating the term…
A nonvolatile memory device includes a substrate comprising a first word line formation area, a second word line formation area, and a support area interposed between the first and second word line formation areas; a first stacked structure disposed over the substrate of each of the first and second word line formation areas and having a plurality of interlayer dielectric layers and a plurality of conductive layers that are alternately stacked therein; a second stacked structure disposed over the substrate of the support area and having the plurality of interlayer dielectric layers and a plurality of spaces that are alternately stacked therein; a channel layer disposed in the first stacked structure; and a memory layer interposed between the channel layer and each of the plurality of conductive layers.
A method for fabricating a nonvolatile memory device, comprising:
Dependencies are inferred from the claim text.