Semiconductor device having fin-shaped structure and bump
AssigneeUnited Microelectronics Corp.
InventorYu-Cheng Tung
Life of this patent
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Abstract
A semiconductor device includes a substrate having a first region and a second region, a fin-shaped structure and a bump on the first region of the substrate, and a shallow trench isolation (STI) around the fin-shaped structure and on the bump. Preferably, the fin-shaped structure and the bump comprise different material, the fin-shaped structure comprises a top portion and a bottom portion, the top portion and the bottom portion comprise different semiconductor material, and a top surface of the bottom portion is lower than a top surface of all of the STI on both the first region and the second region and higher than a top surface of the bump and the top surface of the bump contacts the STI directly.
Claims6
A semiconductor device, comprising:
- a substrate having a first region and a second region;
- a fin-shaped structure and a bump on the first region of the substrate, wherein the fin-shaped structure and the bump comprise different material, the fin-shaped structure comprises a top portion and a bottom portion, the top portion and the bottom portion comprise different semiconductor material and the bottom portion and the bump comprise same material, and the bottom portion comprises silicon and the top portion comprises an epitaxial layer;
- and
- a shallow trench isolation (STI) around the fin-shaped structure and on the bump, wherein a top surface of the bottom portion is lower than a top surface of all of the STI on both the first region and the second region and higher than a top surface of the bump and the top surface of the bump contacts the STI directly.
A semiconductor device, comprising:
- a substrate having a first region and a second region;
- and
- a fin-shaped structure and a bump on the first region of the substrate, wherein the fin-shaped structure and the bump comprise different material, the fin-shaped structure comprises a top portion, a middle portion and a bottom portion, the top portion, the middle portion, and the bottom portion comprise different semiconductor material, the bottom portion comprises silicon, the middle portion comprises a first epitaxial layer, and the top portion comprises a second epitaxial layer;
- and
- a shallow trench isolation (STI) around the fin-shaped structure and on the bump, wherein a top surface of the bottom portion is lower than a top surface of all of the STI on both the first region and the second region and even with a top surface of the bump and the top surface of the bump contacts the STI directly.
A semiconductor device, comprising:
- a substrate having a first region and a second region;
- a fin-shaped structure and a bump on the first region of the substrate, wherein the fin-shaped structure and the bump comprise different material, the fin-shaped structure comprises a top portion and a bottom portion, the top portion and the bottom portion comprise different semiconductor material and the bottom portion and the bump comprise same material, and the bottom portion and the bump comprise a first epitaxial layer and the top portion comprises a second epitaxial layer;
- and
- a shallow trench isolation (STI) around the fin-shaped structure and on the bump, wherein a top surface of the bottom portion is lower than a top surface of all of the STI on both the first region and the second region and higher than a top surface of the bump and the top surface of the bump contacts the STI directly.
Dependencies are inferred from the claim text.