Through-hole electrode substrate and semiconductor device using through-hole electrode substrate
AssigneeDai Nippon Printing Co., Ltd.
InventorsSatoru Kuramochi, Sumio Koiwa, Hidenori Yoshioka
Life of this patent
Estimating the term…
Abstract
A through-hole electrode substrate includes a substrate including a through-hole extending from a first aperture of a first surface to a second aperture of a second surface, an area of the second aperture 5 being larger than that of the first aperture, the through-hole having a minimum aperture part between the first aperture and the second aperture, wherein an area of the minimum aperture part in a planar view is smallest among a plurality of areas of the through-hole in a planar view, a filler arranged within the 10 through-hole, and at least one gas discharge member contacting the filler exposed to one of the first surface and the second surface.
Claims20
A through-hole electrode substrate comprising:
- a substrate including a through-hole extending from a first aperture of a first surface to a second aperture of a second surface, an area of the second aperture being larger than that of the first aperture, the through-hole having a minimum aperture part between the first aperture and the second aperture, wherein an area of the minimum aperture part in a planar view is smallest among a plurality of areas of the through-hole in a planar view;
- a filler arranged within the through-hole;
- and
- at least one gas discharge member contacting the filler exposed to one of the first surface and the second surface,
- wherein a shape of a side wall of the through-hole between the first aperture and the second aperture is a consecutive curve shape,
- the through-hole has a maximum aperture part between the first aperture and the second aperture, and
- the maximum aperture part is larger than the second aperture in a planar view.
A through-hole electrode substrate comprising:
- a substrate including a through-hole extending from a first aperture of a first surface to a second aperture of a second surface, and including a first part and a second part, the second part having a larger area in a planar view than the first part and the first aperture;
- a filler arranged within the through-hole;
- and
- a gas discharge member contacting the filler exposed to one of the first surface and the second surface,
- wherein a shape of a side wall of the through-hole between the first aperture and the second aperture is a consecutive curve shape,
- the through-hole has a maximum aperture part between the first aperture and the second aperture, and
- the maximum aperture part is larger than the second aperture in a planar view.
Dependencies are inferred from the claim text.