US 10,256,132 B2 · Reticle processing system

Abstract

Provided herein are approaches for processing reticle blanks. In one approach, a reticle processing system includes a support assembly having a plate coupled to a frame, and a carrier assembly coupled to the support assembly. In one approach, the carrier assembly includes a carrier base coupled to the plate, a reticle disposed over the carrier base, and a carrier shield disposed over the reticle, wherein the carrier shield may include a central opening formed therein, allowing for placement and extraction of the reticle. In one approach, when the carrier assembly is placed atop the support assembly, a plurality of pins extend from the plate through corresponding openings in the carrier base, the plurality of pins supporting the carrier assembly so the carrier base, the reticle, and the carrier shield are each independently supported and vertically separated from one another.

Claims14

Dependent claims

A reticle processing system comprising:

a support assembly including a plate coupled to a frame;
and
a carrier assembly coupled to the support assembly, the carrier assembly comprising:
a carrier base coupled to the plate;
a reticle disposed over the carrier base;
a carrier shield disposed over the reticle, the carrier shield including a central opening allowing access to the reticle;
and
a plurality of pins which receives executable instructions, wherein the plurality of pins receives the executable instructions to independently support and vertically separate the carrier base, the reticle and the carrier shield from one another and maintain the carrier assembly in an expanded configuration until the carrier assembly is lifted upwardly, causing the carrier base, the carrier shield and the reticle blank to compress and engage each other.

5 more elements

A reticle carrier, comprising:

a carrier assembly comprising:
a carrier base disposed over a carrier plate of a support assembly;
a reticle disposed over the carrier base;
and
a carrier shield disposed over the reticle, the carrier shield including a central opening aligned over the reticle;
and
the support assembly comprising:
a plurality of pins extending from a top surface of the plate through corresponding openings in the carrier base, the plurality of pins supporting the carrier assembly and receiving executable instructions so the carrier base is vertically separated from the plate by a first gap, the reticle is vertically separated from the carrier base by a second gap, and the carrier shield is vertically separated from the reticle by a third gap, wherein the plurality of pins receives the executable instructions to maintain the carrier assembly in an expanded configuration until the carrier assembly is lifted upwardly, causing the carrier base, the carrier shield and the reticle blank to compress and engage each other.

5 more elements

Dependencies are inferred from the claim text.

Reticle processing system

Life of this patent

Reticle processing system

Life of this patent

Abstract

Claims14