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US 10,256,110 B2Granted
Self-aligned patterning process utilizing self-aligned blocking and spacer self-healing
AssigneeTokyo Electron Limited
InventorNihar Mohanty
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Abstract
A multiple patterning process is provided with a self-aligned blocking (SAB) technique. The SAB technique trades off difficult overlay requirements for more manageable etch selectivity requirements between the various layers utilized for the patterning process. As disclosed herein, damage to sidewalls resulting from etching at the self-aligned block masking step may still occur. Damage is repaired by providing a plug layer that fills the areas of the damaged spacers. The plug layer may be the same material as forms the spacers. In this manner, the fill process provides a self-healing mechanism for damaged spacers.
Claims20
A method for multiple patterning lithography processing of a substrate, comprising:
- providing a plurality of mandrels according to a first masking pattern;
- providing a plurality of sidewall spacers, each sidewall spacer positioned on a sidewall surface of one of the plurality of mandrels;
- providing an etch stop layer underlying the plurality mandrels and the plurality of sidewall spacers;
- forming a first plug layer over the plurality of mandrels and the plurality of sidewall spacers;
- providing a second masking pattern;
- etching the first plug layer according to the second masking pattern to remove a plurality of first portions of the first plug layer to expose first regions of the etch stop layer in first spaces with a plurality of second portions of the first plug layer remaining, wherein the etching the first plug layer results in damage to at least some of the plurality of sidewall spacers adjacent the first spaces thereby forming damaged sidewall spacers;
- providing a second plug layer over the substrate, the second plug layer filling the first spaces and being formed of a similar material as the plurality of sidewall spacers are formed of to provide a self-healing effect to the damaged sidewall spacers;
- after providing the second plug layer over the substrate, removing the second portions of the first plug layer;
- removing the plurality of mandrels;
- and
- after removing the second portions of the first plug layer and removing the plurality mandrels, utilizing the plurality of sidewall spacers and portions of the second plug layer as a final masking pattern for etching the substrate.
8 more elements
A method for multiple patterning lithography processing of a substrate, comprising:
- providing a plurality of mandrels according to a first masking pattern;
- providing a plurality of sidewall spacers, each sidewall spacer positioned on a sidewall surface of one of the plurality of mandrels;
- etching a first plug layer according to a self-aligned blocking mask pattern to remove the first plug layer from a plurality of first regions and to leave the first plug layer in a plurality of second regions, wherein the etching the first plug layer results in damage to at least some of the plurality of sidewall spacers thereby creating a plurality of damaged sidewall spacers in the first regions;
- providing a second plug layer over the substrate, the second plug layer filling the plurality of first regions and being formed of a similar material as the plurality of sidewall spacers are formed of to provide a self-healing effect to the plurality of damaged sidewall spacers;
- after providing the second plug layer over the substrate, removing the first plug layer from the plurality of second regions;
- and
- utilizing the plurality of sidewall spacers and portions of the second plug layer as a final masking pattern of the multiple patterning lithography processing for etching the substrate.
4 more elements
A method for multiple patterning lithography processing of a substrate, comprising:
- providing a plurality of mandrels according to a first masking pattern;
- providing a plurality of sidewall spacers, each sidewall spacer positioned on a sidewall surface of one of the plurality of mandrels;
- etching a first plug layer according to a self-aligned blocking mask pattern to remove the first plug layer from a plurality of first regions and to leave the first plug layer in a plurality of second regions, wherein the etching the first plug layer results in damage to at least some of the plurality of sidewall spacers thereby creating a plurality of damaged sidewall spacers in the first regions;
- filling the plurality of first regions with a second plug layer formed of the same material as the plurality of sidewall spacers are formed of, the second plug layer healing the plurality of damaged sidewall spacers;
- planarizing the second plug layer;
- after planarizing the second plug layer, removing the first plug layer from the plurality of second regions;
- and
- utilizing the plurality of sidewall spacers and portions of the second plug layer remaining after the planarizing of the second plug layer, as a final masking pattern of the multiple patterning lithography processing for etching the substrate.
5 more elements
Dependencies are inferred from the claim text.