Disc-shaped heater and heater-cooling-plate assembly
AssigneeNGK Insulators, Ltd.
InventorsHiroshi Takebayashi, Kengo Torii
Life of this patent
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Abstract
An electrostatic chuck heater includes a disc-shaped ceramic base and a plurality of heating elements embedded in the ceramic base. A top surface of the electrostatic chuck heater, which serves as a wafer mounting surface, is divided into multiple zones. The heating elements, which each include terminals that are embedded in the ceramic base in the respective zones. Terminal collection regions are provided on a bottom surface of the electrostatic chuck heater. The number of terminal collection regions is smaller than the total number of heating elements. The terminals of each of the heating elements are connected to one of the terminal collection regions through the ceramic base.
Claims6
A disc-shaped heater in which a top surface of a disc-shaped base is sectioned into multiple zones and heating elements are embedded in the base in the respective zones, each heating element including a pair of terminals, the disc-shaped heater comprising:
- terminal collection regions provided on a bottom surface of the base, the number of the terminal collection regions being smaller than a total number of the heating elements,
- wherein the pair of terminals of each of the heating elements are connected to one of the terminal collection regions through the base,
- wherein the terminal collection regions are one of formed in (i) an arc shape and arranged along a plurality of circles concentric with the outer peripheral circle of the ceramic base, or (ii) a rectangular shape and arranged to be tangent to a plurality of circles concentric with the outer peripheral circle of the ceramic base, and
- wherein each concentric circle comprises a plurality of the terminal collection regions that together form a rotationally symmetrical shape in the concentric circle.
Dependencies are inferred from the claim text.