Fabrication method for thin film transistor, thin film transistor and display apparatus
AssigneeWuhan China Star Optoelectronics Technology Co., Ltd.
InventorWei Wang
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AssigneeWuhan China Star Optoelectronics Technology Co., Ltd.
InventorWei Wang
Estimating the term…
The present application discloses a method for fabricating a thin film transistor including the steps of: sequentially forming an active layer, a gate insulating layer, a gate, and a capacitive insulating layer on a substrate, the gate insulating layer isolating the active layer from the gate; a hydrogen-blocking layer is formed on the side of the capacitive insulating layer facing away from the substrate, and the hydrogen-blocking layer covering the capacitive insulating layer; and performing hydrogenation treatment to the gate insulating layer and the active layer. The present application also discloses a thin film transistor and a display apparatus. In improving the flexibility of the AMOLED display apparatus while ensuring the hydrogenation effect of the polysilicon thin film transistor, the fabricated thin film transistor has high electron mobility, and the display apparatus has a good display performance.
A method for fabricating a thin film transistor, comprising:
A thin film transistor, comprising:
A display apparatus, comprising a thin film transistor, the thin film transistor comprising:
Dependencies are inferred from the claim text.