Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator

A method for active control of a radio frequency (RF) generator, comprising:

• supplying, by a low RF generator, a low RF signal to an impedance matching network coupled to a plasma chamber, wherein the impedance matching network includes a circuit;
• supplying, by a high RF generator, a high RF signal to the impedance matching network;
• accessing a plurality of measurement values of a variable measured at an output of the high RF generator to generate a parameter, wherein the variable is measured during a plurality of cycles of operation of the low RF generator, wherein the plurality of measurement values are associated with a plurality of values of power supplied by the high RF generator;
• and
• determining, based on the parameter, a value of a frequency of the high RF generator, a plurality of amounts of the power to be supplied by the high RF generator, and a value of a factor associated with the circuit for which there is an increase in efficiency in power delivered by the high RF generator.

A controller system for passive control of a radio frequency (RF) generator, comprising:

• a processor configured to:
• access a plurality of measurement values of a variable measured at an output of a high RF generator to generate a parameter, wherein the variable is measured during a plurality of cycles of operation of a low RF generator, wherein the plurality of measurement values are associated with a plurality of values of power supplied by the high RF generator;
• and
• determine, based on the parameter, a value of a frequency of the high RF generator and a value of a factor associated with a circuit of an impedance matching network for which there is an increase in efficiency in power delivered by the high RF generator;
• and
• a memory device coupled to the processor, wherein the memory device is configured to store the value of the frequency of the high RF generator and the value of the factor.

A controller system for active control of a radio frequency (RF) generator, comprising:

• a processor configured to:
• access a plurality of measurement values of a variable measured at an output of a high RF generator to generate a parameter, wherein the variable is measured during a plurality of cycles of operation of a low RF generator, wherein the plurality of measurement values are associated with a plurality of values of power supplied by the high RF generator;
• and
• determine, based on the parameter, a value of a frequency of the high RF generator, a plurality of amounts of the power to be supplied by the high RF generator, and a value of a factor associated with a circuit of an impedance matching network for which there is an increase in efficiency in power delivered by the high RF generator.

A system for passive control of a radio frequency (RF) generator, comprising:

• an impedance matching network, wherein the impedance matching network includes a circuit;
• a plasma chamber coupled to the impedance matching network;
• a low RF generator coupled to the impedance matching network and configured to supply a low RF signal to the impedance matching network;
• a high RF generator coupled to the impedance matching network and configured to supply a high RF signal to the impedance matching network;
• a controller system coupled to the high RF generator, wherein the controller system includes a processor configured to:
• access a plurality of measurement values of a variable measured at an output of the high RF generator to generate a parameter, wherein the variable is measured during a plurality of cycles of operation of the low RF generator, wherein the plurality of measurement values are associated with a plurality of values of power supplied by the high RF generator;
• and
• determine, based on the parameter, a value of a frequency of the high RF generator and a value of a factor associated with the circuit for which there is an increase in efficiency in power delivered by the high RF generator.

A system for active control of a radio frequency (RF) generator, comprising:

• an impedance matching network, wherein the impedance matching network includes a circuit;
• a plasma chamber coupled to the impedance matching network;
• a low RF generator coupled to the impedance matching network and configured to supply a low RF signal to the impedance matching network;
• a high RF generator coupled to the impedance matching network and configured to supply a high RF signal to the impedance matching network;
• a controller system coupled to the high RF generator, wherein the controller system includes a processor configured to:
• access a plurality of measurement values of a variable measured at an output of the high RF generator to generate a parameter, wherein the variable is measured during a plurality of cycles of operation of the low RF generator, wherein the measurement values are associated with a plurality of values of power supplied by the high RF generator;
• and
• determine, based on the parameter, a value of a frequency of the high RF generator, a plurality of amounts of the power to be supplied by the high RF generator, and a value of a factor associated with the circuit for which there is an increase in efficiency in power delivered by the high RF generator.