Optimized sub-sampling in an electron microscope
AssigneeBattelle Memorial Institute
InventorsAndrew J. Stevens, Libor Kovarik, Andrey V. Liyu, Nigel D. Browning
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Abstract
Disclosed are methods for optimized sub-sampling in an electron microscope. With regard at least to utilization of electron dose budgets, of time for acquisition of measurements, and of computing/processing capabilities, very high efficiencies can be achieved by informing and/or adapting subsequent sub-sampling measurements according to one or more earlier-acquired sparse datasets and/or according to analyzes thereof.
Claims21
A method for optimized sub-sampling in an electron microscope, the method comprising:
- a) Performing a computational analysis based on a feature of an initial sparse dataset acquired from an initial sub-sampled measurement of a specimen, the sub-sampled measurement utilizing an initial sub-sampling scheme and an initial electron dose;
- b) Determining an adapted, sub-sampling scheme based on the computational analysis;
- and
- c) Acquiring an adapted sparse dataset from an adapted, sub-sampled measurement of the specimen that utilizes the adapted sub-sampling scheme and an adjusted electron dose.
A method for optimized sub-sampling in electron microscopes, the method comprising acquiring an adapted sparse dataset from an adapted sub-sampled measurement of a specimen using an electron beam probe that utilizes an adapted sub-sampling scheme and an adjusted electron dose, wherein the adapted sampling scheme is determined according to a computational analysis of one or more features of one or more initial sparse datasets acquired from respective initial sub-sampled measurements that utilize respective initial sampling schemes and initial electron doses.
A non-transitory computer-readable storage medium storing one or more programs, the one or more programs comprising instructions, which when executed by one or more processors of an electronic device in operable communication with an electron microscope, cause the electronic device, the electron microscope, or a sub-system thereof, to acquire an adapted sparse dataset from an adapted sub-sampled measurement of a specimen using an electron beam probe that utilizes an adapted sub-sampling scheme and an adjusted electron dose, wherein the adapted sampling scheme is determined according to a computational analysis of one or more features of one or more initial sparse datasets acquired from respective initial sub-sampled measurements that utilize respective initial sampling schemes and initial electron doses.
Dependencies are inferred from the claim text.