Back to results
US 10,256,070 B2Granted
Stage mechanism
AssigneeNuFlare Technology, Inc.
InventorsHiroshi Matsumoto, Shuji Yoshino
Life of this patent
Estimating the term…
Abstract
According to one aspect of the present invention, a stage mechanism includes a movable stage disposed in a vacuum atmosphere and mounting a heat source, a first heat pipe connected to the heat source, a movable mechanism configured to move according to the movement of the first heat pipe caused by the movement of the stage, by using a portion of the first heat pipe, and a cooling mechanism configured to cool the first heat pipe through the movable mechanism.
Claims9
A stage mechanism comprising:
- a movable stage disposed in a vacuum atmosphere and mounting a heat source;
- a first heat pipe connected to the heat source;
- a movable mechanism configured to move according to the movement of the first heat pipe caused by the movement of the stage, by using a portion of the first heat pipe;
- and
- a cooling mechanism configured to cool the first heat pipe through the movable mechanism,
- wherein a blanking aperture array mechanism individually performing blanking deflection of multiple beams using a charged particle beam is used as the heat source.
3 more elements
Dependencies are inferred from the claim text.