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US 10,256,003 B2Granted
Blind-vented electrode
AssigneePlansee Japan Ltd.
InventorNoboru Shirozu
Life of this patent
Estimating the term…
Abstract
A vented electrode that provides a directional stop to prevent energetic particles and secondaries (i.e., secondary electrons, charged particles, photons) generated in the vent channel from reaching into a gap outside of the electrode plate. For example, ventilation is added to at least one electrode, via vented inserts, wherein the vents do not provide a direct line of sight from at least one side of the electrode plate to the other.
Claims19
A vented electrode, comprising:
- a plate including a front face and a rear face;
- the plate additionally including a venting portion and at least one aperture;
- and
- the venting portion including a plurality of holes in the front face of the plate and a plurality of holes in the rear face of the plate, wherein no direct line of sight exists between the holes of in the front face and the holes in the back face in at least one direction of:
- from the front of the plate to the back of the plate or from the back of the plate to the front of the plate;
- wherein said venting portion is removably connected to said plate.
3 more elements
A vented electrode, comprising:
- a plate including a front face and a rear face;
- the plate additionally including a venting portion and at least one aperture;
- and
- the venting portion including a plurality of holes in the front face of the plate and a plurality of holes in the rear face of the plate, wherein no direct line of sight exists between the holes of in the front face and the holes in the back face in at least one direction of:
- from the front of the plate to the back of the plate or from the back of the plate to the front of the plate;
- wherein the venting portion includes at least one blind-venting insert removably fixed to said plate.
3 more elements
A blind-venting insert for an electrode, comprising:
- a body configured to mate with a slot in a plate carrying an electrode;
- the body including a plurality of holes in the front face of the plate and a plurality of holes in the rear face of the plate, wherein no direct line of sight exists between the holes of in the front face and the holes in the back face in at least one direction of:
- from the front of the plate to the back of the plate or from the back of the plate to the front of the plate;
- wherein said body of the venting portion is configured to be removably connected to the plate.
1 more element
Dependencies are inferred from the claim text.