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US 10,256,001 B2Granted
Metal grating structure for X-ray
AssigneeKonica Minolta, Inc.
InventorMitsuru Yokoyama
Life of this patent
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Abstract
A metal grating structure for X-ray includes a first silicon part having a plate form or a layer form, and a grating portion, wherein the grating portion includes a plurality of second silicon parts formed on the first silicon part, and a plurality of metal parts interposed between the respective adjacent second silicon parts, each of the plurality of metal parts having a deposition start tip part extending toward an inside of the first silicon part.
Claims12
A metal grating structure for X-ray, comprising:
- a first silicon part having a plate form or a layer form;
- and
- a grating portion, wherein
- the grating portion includes a plurality of second silicon parts formed on the first silicon part, and a plurality of metal parts interposed between respective adjacent second silicon parts, each of the plurality of metal parts having a deposition start tip part extending into the first silicon part, and
- each metal part is longer than each of the second silicon parts by a length of the deposition start tip part in a depth direction perpendicular to the first silicon part.
2 more elements
Dependencies are inferred from the claim text.