Substrate processing apparatus, editing apparatus and method and non-transitory storage medium

A non-transitory storage medium storing a program executable by a computer serving as a control unit of a substrate processing apparatus,

• wherein the substrate processing apparatus includes:
• a substrate processing unit processing a substrate, the process processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate;
• the control unit having a non-transitory storage medium that stores operation commands as a single macro, the operation commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, wherein the control unit controls the substrate processing apparatus according to the macro;
• an input unit that allows inputting of the operation commands into the control unit;
• and
• a display unit that displays information related to the operation commands inputted into the control unit,
• wherein the storage medium stores a program, upon execution of which a function of editing and displaying a maintenance recipe is realized via the computer,
• wherein the function includes a function to make the display unit display respectively the operation command for shutdown and the operation command for startup in different display areas on a single edit screen of the display unit, and to allow editing of the macro in the respective display areas on the single edit screen by using the input unit,
• wherein a control unit allows editing of the macro related to an order of execution of a group of the operation commands for shutdown and an order of execution of a group of the operation commands for startup by using the input unit on the single edit screen, and
• wherein the control unit makes the display unit display a single execution screen in order to execute the macro, and the group of the operation commands for shutdown and the group of the operation commands for startup are both displayed in the respective display areas on the single execution screen.

An editing apparatus for editing operation commands for use in a substrate processing apparatus having a non-transitory storage medium that stores operation commands as a single macro, the operation commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, the editing apparatus comprising:

• a substrate processing unit processing a substrate, the substrate processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate;
• a display unit that displays both the operation command for shutdown and the operation command for startup respectively in different display areas on a single edit screen of the display unit;
• an editing unit that allows the single macro including both the operation command for shutdown and the operation command for startup to be edited in the respective display areas on the single screen in accordance with inputs by the input unit;
• and
• a transmission unit that transmits the single macro having been edited by the editing unit to the substrate processing apparatus.

An editing method of editing operation commands for use in a substrate processing apparatus having a non-transitory storage medium that stores operation commands as a single macro, the substrate processing apparatus comprising:

• a substrate processing unit processing a substrate, the substrate processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate, the commands including an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, the editing method comprising:
• displaying respectively both the operation command for shutdown and the operation command for startup in different display areas on a single edit screen;
• allowing the single macro including both the operation command for shutdown and the operation command for startup to be edited in the respective display areas on the single edit screen in accordance with an input by the input unit;
• and
• transmitting the single macro having been edited by the editing unit to the substrate processing apparatus;
• wherein a control unit allows editing of the macro related to an order of execution of a group of the operation commands for shutdown and an order of execution of a group of the operation commands for startup by using the input unit on the single edit screen by using the input unit, and
• wherein the control unit makes the display unit to display a single execution screen in order to execute the macro, and the group of the operation commands for shutdown and the group of the operation commands for startup are both displayed together on the single execution screen.

A non-transitory storage medium storing a program for performing an editing method for editing an operation command for use in a substrate processing apparatus having a function for storing operation commands as a single macro, the operation commands including a command for processing a substrate in a substrate processing unit, the substrate processing unit being configured to process the substrate while at least one of heating the substrate or supplying a processing liquid with the substrate, an operation command for shutdown of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred from a normally-operating condition to a condition suitable for man power maintenance, and an operation command for startup of the substrate processing apparatus by which the substrate processing apparatus is automatically transferred to a condition suitable for normal operation after completion of the man power maintenance, the editing method comprising:

• displaying respectively both the operation command for shutdown and the operation command for startup together in different display areas on a single edit screen;
• allowing the single macro including both the operation command for shutdown and the operation command for startup to be edited in the different display areas on the single edit screen in accordance with an input by the input unit;
• and
• transmitting the single macro having been edited by the editing unit to the substrate processing apparatus.