Exposure apparatus, exposure method, and device manufacturing method
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
Estimating the term…
Abstract
An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.
Claims26
A detection device that detects a mark of an object, the device comprising:
- a detection system that has a barrel provided with an optical member inside, a detection light being irradiated on the object via the optical member and the detection light reflected off the object being detected via the optical member;
- a base member disposed below the detection system and supported so that a surface of the base member is substantially parallel to a predetermined plane;
- a holding member disposed on the base member, the holding member being provided with a holder to hold the object on an upper surface side of the holding member and provided with a measurement surface on a lower surface side of the holding member in a direction orthogonal to the predetermined plane, and the measurement surface having a reflective two-dimensional grating;
- a drive system that has a motor to drive the holding member and moves the holding member at least in a direction parallel to the predetermined plane;
- a measurement system that has a head section installed via a vibration isolation member so that the head section is disposed lower than the measurement surface below the detection system, and measures positional information of the holding member, the measurement system irradiating the measurement surface from below with a measurement beam via the head section and detecting the measurement beam reflected off the measurement surface via the head section;
- and
- a controller that controls the drive system based on measurement information of the measurement system so that the detection light is irradiated on the mark, wherein
- the measurement system irradiates the measurement surface with a plurality of measurement beams including the measurement beam, and
- the plurality of measurement beams are respectively irradiated on measurement points whose positions are different from each other in at least one of a first direction and a second direction orthogonal to each other within the predetermined plane.
A detection method of detecting a mark of an object, the method comprising:
- holding the object with a holding member disposed on a base member that is supported so that a surface of the base member is substantially parallel to a predetermined plane, below a detection system that has a barrel provided with an optical member inside, the holding member being provided with a holder to hold the object on an upper surface side of the holding member and provided with a measurement surface on a lower surface side of the holding member in a direction orthogonal to the predetermined plane, and the measurement surface having a reflective two-dimensional grating;
- measuring positional information of the holding member, with a measurement system that has a head section installed via a vibration isolation member so that the head section is disposed lower than the measurement surface below the detection system, a measurement beam being irradiated on the measurement surface from below via the head section and the measurement beam reflected off the measurement surface being detected via the head section;
- and
- moving the holding member based on measurement information of the measurement system so that the mark is detected by the detection system, a detection light being irradiated on the object via the optical member and the detection light reflected off the object being detected via the optical member, wherein
- a plurality of measurement beams including the measurement beam are irradiated on the measurement surface, and
- positions of measurement points on which the plurality of measurement beams are respectively irradiated are different from each other in at least one of a first direction and a second direction orthogonal to each other within the predetermined plane.
Dependencies are inferred from the claim text.