Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
AssigneeASML Netherlands B.V.
InventorsRaymond Wilhelmus Louis Lafarre, Nicolaas Ten Kate, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade
Life of this patent
Estimating the term…
Abstract
A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of an electronic component such as a thin film electronic component. The planarization layer may be provided in multiple sub layers. The planarization layer may smooth over roughness caused by removal of material from a blank to form burls on the substrate holder.
Claims20
A substrate holder comprising:
- a main body having a surface;
- a plurality of burls projecting from the surface of the main body, each of the burls having an end surface and a side surface extending from the end surface to the surface of the main body;
- and
- a layer provided on at least part of the surface of the main body, wherein the layer is located between the burls without substantially covering the end surfaces of the burls and without substantially touching the side surfaces;
- and
- an electrical component provided on the layer.
A lithographic apparatus, comprising:
- a support structure configured to support a patterning device;
- a projection system arranged to project a beam patterned by the patterning device onto a substrate;
- and
- a substrate holder arranged to hold the substrate, the substrate holder comprising:
- a main body having a surface,
- a plurality of burls projecting from the surface of the main body, each of the burls having an end surface and a side surface extending from the end surface to the surface of the main body;
- and
- a layer provided on at least part of the surface of the main body, wherein the layer is located between the burls without substantially covering the end surfaces of the burls and without substantially touching the side surfaces, and
- an electrical component provided on the layer.
A device manufacturing method comprising:
- holding a substrate on end surfaces of a plurality of burls of a substrate holder, wherein the substrate holder comprises:
- a main body having a surface from which the burls project, each of the burls having an end surface and a side surface extending from the end surface to the surface of the main body;
- a layer provided on at least part of the surface of the main body, wherein the layer is located between the burls without substantially covering the end surfaces of the burls and without substantially touching the side surfaces;
- and an electrical component provided on the layer;
- and
- projecting a beam of radiation onto the substrate.
Dependencies are inferred from the claim text.