Microelectromechanical mirror assembly
AssigneeNikon Corporation
InventorsShane R. Palmer, Michael Binnard
Life of this patent
Estimating the term…
Abstract
An optical element assembly includes a base, and an element unit. The element unit includes (i) an optical element having an element central axis and an element perimeter; and (ii) an element connector assembly that couples the optical element to the base, the element connector assembly including a flexure assembly having an element flexure and a base flexure. A distal end of the element flexure is coupled to the optical element near the element perimeter, a distal end of the base flexure is coupled to the base, and a proximal end of the element flexure is coupled to a proximal end of the base flexure near the element central axis.
Claims20
An optical element assembly for adjusting the characteristics of a beam, the optical element assembly comprising:
- a base;
- an optical element which the beam is incident thereon, the optical element including an element central axis;
- a mover which moves the optical element in a move direction which crosses to a surface of the base;
- a first flexure which is arranged between the optical element and the base, the first flexure extending in a first direction which crosses to the move direction, the first flexure having a first end which is connected to the optical element at a first position which is away from the element central axis of the optical element, and a second end which is located at a second position that is nearer to the element central axis of the optical element than the first position;
- and
- a second flexure which is arranged between the optical element and the base, the second flexure extending in a second direction which crosses to the move direction, the second flexure having a third end which is connected to the optical element at a third position which is away from the element central axis of the optical element, and a fourth end which is located at a fourth position that is nearer to the element central axis of the optical element than the third position;
- wherein the first end and the second end of the first flexure move different distances than one another when the optical element is moved in the move direction;
- and wherein the third end and the fourth end of the second flexure move different distances than one another when the optical element is moved in the move direction.
A method for adjusting the characteristics of a beam, the method comprising the steps of:
- providing a base;
- providing an optical element which the beam is incident thereon, the optical element including an element central axis;
- arranging a first flexure between the optical element and the base, the first flexure extending in a first direction which crosses to the move direction, the first flexure having a first end which is connected to the optical element at a first position which is away from the element central axis of the optical element, and a second end which is located at a second position that is nearer to the element central axis of the optical element than the first position;
- arranging a second flexure between the optical element and the base, the second flexure extending in a second direction which crosses to the move direction, the second flexure having a third end which is connected to the optical element at a third position which is away from the element central axis of the optical element, and a fourth end which is located at a fourth position that is nearer to the element central axis of the optical element than the third position;
- and
- moving the optical element in a move direction which crosses to a surface of the base with a mover;
- wherein the first end and the second end of the first flexure move different distances than one another when the optical element is moved in the move direction;
- and wherein the third end and the fourth end of the second flexure move different distances than one another when the optical element is moved in the move direction.
Dependencies are inferred from the claim text.