Imprint apparatus and method of manufacturing article

An imprint apparatus which forms a pattern of an imprint material on a shot region on a substrate by using a mold, the apparatus comprising:

• a supply device having a plurality of discharge outlets each of which is configured to discharge the imprint material as a droplet, and configured to supply the imprint material to the substrate;
• and
• a controller configured to control the supply device so as to supply the imprint material from the plurality of discharge outlets onto the shot region,
• wherein each of the plurality of discharge outlets is provided with a control element configured to control an amount of the imprint material to be discharged as a droplet in accordance with a supplied signal value, and
• wherein the controller:
• estimates a characteristic degradation of the control element for each of the plurality of discharge outlets, based on information indicating a driving voltage that has been applied to each discharge outlet and a cumulative time of application of the driving voltage, and
• selects discharge outlets to be used to supply the imprint material to the shot region among the plurality of discharge outlets, so as to preferentially use discharge outlets that have a smaller estimated characteristic degradation as compared to other discharge outlets.

An imprint apparatus which forms a pattern of an imprint material on a shot region on a substrate by using a mold, the apparatus comprising:

• a supply device having a plurality of discharge outlets each of which is configured to discharge the imprint material as droplets;
• and
• a controller configured to control the supply device, so as to discharge the imprint material as droplets from the plurality of discharge outlets and supply the imprint material onto the shot region,
• wherein a discharge amount of the imprint material to be discharged as a droplet from each discharge outlet changes in accordance with a cumulative number of times the imprint material has been discharged as droplets, and
• wherein the controller is configured to control the supply device based on information indicating the cumulative number of times for each discharge outlet, so that the discharge amount for each discharge outlet is brought close to a target amount.