Array substrate including pixel electrode and drain electrode in direct contact to each other, and method of manufacturing the same, display panel, and display device
AssigneesBoe Technology Group Co., Ltd., Beijing Boe Display Technology Co., Ltd.
InventorsShoukun Wang, Huibin Guo, Yuchun Feng, Liangliang Li
Life of this patent
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Abstract
An array substrate and a method of manufacturing the same, a display panel and a display device are provided. The array substrate includes a thin film transistor and a pixel electrode. An insulating layer is formed between a drain electrode of the thin film transistor and the pixel electrode. The drain electrode is in direct electrical contact with the pixel electrode through a via-hole in the insulating layer.
Claims8
An array substrate, comprising a plurality of pixel regions, wherein each of the pixel regions comprises a thin film transistor and a pixel electrode arranged on a base substrate, the array substrate further comprises an insulating layer between a drain electrode of the thin film transistor and the pixel electrode, wherein the insulating layer comprises a via-hole through which the drain electrode is in direct electrical contact with the pixel electrode,
- the insulating layer is a gate insulating layer,
- the drain electrode of the thin film transistor is arranged at a side of the gate insulating layer close to the base substrate, and the pixel electrode is arranged at a side of the gate insulating layer away from the base substrate,
- wherein the thin film transistor is a top-gate thin film transistor, and the array substrate further comprises:
- the base substrate;
- a source electrode and the drain electrode of the thin film transistor arranged on the base substrate;
- an active layer, two ends of which are directly overlapped onto the source electrode and the drain electrode respectively;
- the gate insulating layer covering the active layer, the source electrode and the drain electrode, wherein the gate insulating layer is provided with a via-hole exposing a part of the drain electrode;
- a gate electrode of the thin film transistor arranged on the gate insulating layer;
- a plate-like pixel electrode arranged on the gate insulating layer, wherein a part of the pixel electrode is inserted into the via-hole to be in direct electrical contact with the drain electrode;
- a passivation layer covering the entire base substrate;
- and
- a slit common electrode arranged on the passivation layer.
A method of manufacturing an array substrate comprising a plurality of pixel regions, comprising:
- providing a base substrate;
- forming a thin film transistor and a pixel electrode in each of the pixel regions;
- forming an insulating layer between a drain electrode of the thin film transistor and the pixel electrode;
- forming the gate insulating layer and an active layer of the thin film transistor by one patterning process,
- wherein the forming an insulating layer comprises:
- forming in the insulating layer a via-hole through which the drain electrode is in direct electrical contact with the pixel electrode,
- wherein the insulating layer is a gate insulating layer,
- wherein the forming the gate insulating layer and an active layer of the thin film transistor by one patterning process further comprises:
- forming a gate insulating layer and a semiconductor layer successively;
- coating photoresist onto the semiconductor layer, exposing the photoresist using a grey tone mask plate or a halftone mask plate to form a photoresist fully-reserved region, a photoresist partially-reserved region and a photoresist fully-unreserved region, the photoresist fully-reserved region corresponds to a region of the active layer, the photoresist fully-unreserved region corresponds to a region of the via-hole, and the photoresist partially-reserved region corresponds to other regions;
- removing the semiconductor layer and the insulating layer at the photoresist fully-unreserved region to form the via-hole;
- removing the photoresist at the photoresist partially-reserved region through an ashing process;
- removing the semiconductor layer at the photoresist partially-reserved region;
- and
- peeling off a remaining part of the photoresist to form the active layer of the thin film transistor.
A method of manufacturing an array substrate comprising a plurality of pixel regions, comprising:
- providing a base substrate;
- forming a thin film transistor and a pixel electrode in each of the pixel regions;
- forming an insulating layer between a drain electrode of the thin film transistor and the pixel electrode;
- forming the gate insulating layer and a gate electrode of the thin film transistor by one patterning process;
- wherein the forming an insulating layer comprises:
- forming in the insulating layer a via-hole through which the drain electrode is in direct electrical contact with the pixel electrode,
- wherein the insulating layer is a gate insulating layer,
- wherein the thin film transistor is a top-gate thin film transistor, and the method further comprises:
- providing a base substrate;
- forming a source electrode and the drain electrode of the thin film transistor on the base substrate;
- forming an active layer, two ends of which are directly overlapped onto the source electrode and the drain electrode respectively;
- forming the gate insulating layer covering the active layer, the source electrode and the drain electrode;
- forming a gate metal layer on the gate insulating layer, performing a patterning process to the gate insulating layer and the gate metal layer to form the gate electrode of the thin film transistor, and forming the via-hole in the gate insulating layer to expose a part of the drain electrode;
- forming a plate-like pixel electrode on the gate insulating layer, wherein a part of the pixel electrode is inserted into the via-hole to be in direct electrical contact with the drain electrode;
- forming a passivation layer covering the pixel electrode and the pixel electrode;
- and
- forming a slit common electrode on the passivation layer.
Dependencies are inferred from the claim text.