Magnetic annealing apparatus
AssigneeTokyo Electron Limited
InventorsMitsuru Yamazaki, Barry Clarke, Ian Colgan, George Eyres, Ioan Domsa
Life of this patent
Estimating the term…
Abstract
Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.
Claims15
A magnetic annealing apparatus comprising:
- a processing container having a horizontally-elongated tubular shape, and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field;
- a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside;
- a magnet provided to cover the heating unit from the outside of the heating unit;
- a substrate holder configured to hold the plurality of substrates within the processing container;
- and
- a plurality of shielding plates, wherein a first shielding plate of the plurality of shielding plates is provided at one end of the processing container and a second shielding plate of the plurality of shielding plates is provided at another end of the processing container, respectively,
- wherein at least one of the plurality of heat shielding plates includes a slit formed thereon.
Dependencies are inferred from the claim text.