Ultra-compact mass analysis device and ultra-compact particle acceleration device

An accelerator, comprising:

• a main substrate having a first face and a second face,
• a first substrate adhered to the first face of the main substrate,
• a second substrate adhered to the second face of the main substrate,
• linear acceleration system that accelerates or decelerates charged particles and/or a focusing system that focuses the charged particles,
• a plurality of cavities penetrating from the first face of the main substrate to the second face of the main substrate, at least two of the cavities being adjacent cavities,
• a main substrate wall plate of the main substrate partitioning the adjacent two cavities,
• a pathway of the main substrate wall plate connecting the adjacent two cavities, and
• an electrode on the main substrate wall plate
• wherein the charged particles enter one of the adjacent two cavities from the other of the adjacent two cavities through the pathway,
• wherein the charged particles are accelerated or decelerated by a high-frequency voltage or a direct voltage applied to the electrode on the main substrate wall plate,
• wherein the focusing system is disposed in a first cavity of the cavities penetrating from the first face of the main substrate to the second face of the main substrate, and
• the focusing system has four-pole magnets, and
• a first of the four-pole magnets is disposed outside of the first substrate adhered to the first face of the main substrate in the first cavity which the charged particles pass through, and
• a second of the four-pole magnets is disposed outside of the second substrate adhered to the second face of the main substrate in the first cavity, and
• the third and fourth of the four-pole magnets are disposed outside of both side faces of the main substrate in the first cavity which the charged particles pass through.

A charged particle generator that generates charged particles, comprising:

• a main substrate having a first face and a second face,
• a first substrate adhered to the first face of the main substrate,
• a second substrate adhered to the second face of the main substrate, and
• a charged particles generating cavity that generates the charged particles, the charged particles generating cavity penetrating from the first face of the main substrate to the second face of the main substrate.