Material measurement techniques using multiple X-ray micro-beams
AssigneeSigray, Inc.
InventorsWenbing Yun, Sylvia Jia Yun Lewis, Janos Kirz
Life of this patent
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Abstract
An x-ray interrogation system having one or more x-ray beams interrogates an object (i.e., object). A structured source producing an array of x-ray micro-sources can be imaged onto the object. Each of the one or more beams may have a high resolution, such as for example a diameter of about 15 microns or less, at the surface of the object. The illuminating one or more micro-beams can be high resolution in one dimension and/or two dimensions, and can be directed at the object to illuminate the object. The incident beam that illuminates the object has an energy that is greater than the x-ray fluorescence energy.
Claims23
A method to perform spatially resolved x-ray fluorescence analysis, comprising:
- directing an x-ray excitation beam upon an object to generate fluorescent x-rays, the x-ray excitation beam comprising a planar array of x-ray micro-beams, the individual x-ray micro-beams each having a diameter smaller than 15 microns at a surface of the object;
- and
- imaging the fluorescent x-rays with an x-ray imaging system that includes an x-ray imaging optical system and an energy resolving and spatially resolving x-ray detector, the x-ray imaging optical system collecting fluorescent x-rays generated by the object when illuminated by the x-ray excitation beam, the x-ray imaging optical system positioned such that an object plane of the x-ray imaging optical system is coplanar with the plane of the planar array of micro-beams within a depth of field of the x-ray imaging optical system, the energy resolving and spatially resolving x-ray detector positioned at an image plane of the x-ray imaging optical system.
A method to perform spatially resolved x-ray diffraction analysis, comprising:
- directing an incident x-ray beam upon an object to generate diffracted x-rays, the incident x-ray beam comprising an array of x-ray micro-beams, the individual x-ray micro-beams each having a diameter smaller than 15 microns at a surface of the object;
- recording diffraction patterns with a spatially resolving x-ray detector positioned a first distance from the object;
- and
- recording additional diffraction patterns by rotating the object relative to the incident x-ray beam.
Dependencies are inferred from the claim text.