Optical arrangement for a spectral analysis system, method for its production, and spectral analysis system
AssigneeFraunhofer-Gesellschaft zur Föderung der angewandten Forschung e.V.
InventorsHeinrich Grueger, Jens Knobbe, Tino Puegner
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Abstract
An optical arrangement for a spectral analysis system, a method for producing an optical arrangement for a spectral analysis system and a spectral analysis system are disclosed. In an embodiment the optical arrangement includes a carrier substrate having a placement area for a frame and a base area, and a diffraction grating movably arranged in the frame, wherein the frame is arranged on the placement area in an inclined placement position with respect to the base area so that the diffraction grating, arranged in a base position, is inclined with respect to the base area.
Claims15
An optical arrangement for a spectral analysis system comprising:
- a carrier substrate comprising:
- a placement area for a frame;
- and
- a base area;
- and
- a diffraction grating movably arranged in the frame, wherein the frame is arranged on the placement area in an inclined placement position with respect to the base area so that the diffraction grating, arranged in a base position, is inclined with respect to the base area.
A method for producing an optical arrangement for a spectral analysis system, the method comprising:
- producing a component substrate having a diffraction grating that is arranged movably in a frame,
- producing a carrier substrate having a base area and a placement area for the frame, wherein the placement area is configured such that it defines a placement position for the frame that is inclined with respect to the base area;
- and
- assembling the component substrate and the carrier substrate so that the frame is arranged on the placement area in a placement position that is inclined with respect to the base area and so that the diffraction grating is in a base position that is inclined with respect to the base area of the carrier substrate.
Dependencies are inferred from the claim text.