# US 10,246,374 B2 · Method for manufacturing glass film laminate, glass film laminate, and method for manufacturing electronic device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,246,374 B2 - Document ID: US10246374B2 - Status: Granted - Kind: B2 - Application number: 15/029,371 - Filed: 2014-10-07 - Published: 2016-08-11 - Granted: 2019-04-02 - Earliest claimed: 2013-10-16 - Assignees: Nippon Electric Glass Co., Ltd. - Applicants: Nippon Electric Glass Co., Ltd. - Inventors: Naotoshi Inayama; Mutsumu Fukada - Web page: https://patentgrep.com/patent/US10246374B2 ## CPC - C03C 27/06: Joining glass to glass by processes other than fusing (fusing C03B23/20; units for use as elements for closing wall or like openings and comprising two or more parallel glass panes in spaced relationship, the panes being permanently secured together E06B3/66) - B32B 7/06: permitting easy separation - B32B 17/00: Layered products essentially comprising sheet glass, or glass, slag, or like fibres - B32B 17/06: comprising glass as the main or only constituent of a layer, next to another layer of a specific {material} - C03C 23/0075: {Cleaning of glass (specially adapted to plate glass B08B11/00)} - H10K 71/80: using temporary substrates - H10K 77/10: Substrates, e.g. flexible substrates - H10K 50/841: {Self-supporting sealing arrangements} - H10K 71/50: Forming devices by joining two substrates together, e.g. lamination techniques - Y02E 10/549: Organic PV cells - Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product - C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS - B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION - Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS ## Abstract Provided are a glass film layered body and a method for manufacturing a glass film layered body whereby glass film yield and nondefective product rate are enhanced while handling properties of the glass film are enhanced. A method for manufacturing a glass film layered body fabricated by layering a glass film on a support glass, the method provided with an ultrasonic wave application step for applying ultrasonic waves to at least peripheral parts of the glass film and the support glass, a cleaning step for cleaning the glass film and support glass which have undergone the ultrasonic wave application step, and a layering step for layering the glass film on the support glass which has undergone the cleaning step and fabricating a glass film layered body. ## Claims ### Claim 1 A glass film laminate produced by laminating directly a glass film and a support glass, characterized in that all edge sides of the glass film contact the support glass without clearance, wherein the glass film contacts the support glass without clearance with a width not less than 10 mm from all the edge sides of the glass film, wherein a number of bubbles in a part of the glass film laminate except for the part in which the glass film contacts the support glass without clearance is not less than 0.1/m2 and not more than 10000/m2. ### Claim 2 (depends on 1) The glass film laminate according to claim 1, wherein a film layer is provided in the support glass. ### Claim 3 (depends on 1) A method for manufacturing a glass film laminate according to claim 1 produced by laminating a glass film on a support body, comprising: an ultrasonic wave application step in which an ultrasonic wave is applied to at least peripheral parts of the glass film and the support body; a washing step in which the glass film and the support body passing through the ultrasonic wave application step are washed; and a laminating step in which the glass film and the support body passing through the washing step are laminated so as to produce the glass film laminate. ### Claim 4 (depends on 3) The method for manufacturing the glass film laminate according to claim 3 wherein the support body is support glass. ### Claim 5 (depends on 4) The method for manufacturing the glass film laminate according to claim 4, further comprising: an ultrasonic wave washing step in which the glass film and the support glass are dipped in liquid in an ultrasonic wave washing tub and the whole of the glass film and the support glass are ultrasonic-washed by the ultrasonic wave washing tub. ### Claim 6 (depends on 4) The method for manufacturing the glass film laminate according to claim 4, further comprising: an open bubble inspection step inspecting existence of an open bubble which is a bubble existing in an interface of the glass film and the support glass and contacting an edge side of the glass film. ### Claim 7 (depends on 6) The method for manufacturing the glass film laminate according to claim 6, wherein in the open bubble inspection step, existence of a bubble except for the open bubble in a peripheral part of the glass film laminate corresponding to the peripheral part of the glass film is inspected further. ### Claim 8 (depends on 7) The method for manufacturing the glass film laminate according to claim 7, wherein the peripheral part of the glass film laminate is within a width of not less than 10 mm from the edge side of the glass film. ### Claim 9 (depends on 8) The method for manufacturing the glass film laminate according to claim 8, wherein a number of bubbles in the glass film laminate except for the peripheral part is not less than 0.1/m2 and not more than 10000/m2. ### Claim 10 (depends on 7) The method for manufacturing the glass film laminate according to claim 7, wherein a number of bubbles in the glass film laminate except for the peripheral part is not less than 0.1/m2 and not more than 10000/m2. ### Claim 11 (depends on 4) The method for manufacturing the glass film laminate according to claim 4, wherein in the ultrasonic wave application step, the ultrasonic wave is applied by a horn-type ultrasonic wave generator. ### Claim 12 (depends on 3) The method for manufacturing the glass film laminate according to claim 3, wherein in the ultrasonic wave application step, the ultrasonic wave is applied by a horn-type ultrasonic wave generator. ### Claim 13 (depends on 12) The method for manufacturing the glass film laminate according to claim 12, wherein in the ultrasonic wave application step, the ultrasonic wave is applied to only the peripheral parts of the glass film and the support glass. ### Claim 14 (depends on 3) The method for manufacturing the glass film laminate according to claim 3, further comprising: an ultrasonic wave washing step in which the glass film and the support body are dipped in liquid in an ultrasonic wave washing tub and the whole of the glass film and the support body are ultrasonic-washed by the ultrasonic wave washing tub. ### Claim 15 (depends on 3) The method for manufacturing the glass film laminate according to claim 3, further comprising: an open bubble inspection step inspecting existence of an open bubble which is a bubble existing in an interface of the glass film and the support body and contacting an edge side of the glass film. ### Claim 16 (depends on 15) The method for manufacturing the glass film laminate according to claim 15, wherein in the open bubble inspection step, existence of a bubble except for the open bubble in a peripheral part of the glass film laminate corresponding to the peripheral part of the glass film is inspected further. ### Claim 17 (depends on 16) The method for manufacturing the glass film laminate according to claim 16, wherein the peripheral part of the glass film laminate is within a width of not less than 10 mm from the edge side of the glass film. ### Claim 18 (depends on 17) The method for manufacturing the glass film laminate according to claim 17, wherein a number of bubbles in the glass film laminate except for the peripheral part is not less than 0.1/m2 and not more than 10000/m2. ### Claim 19 (depends on 16) The method for manufacturing the glass film laminate according to claim 16, wherein a number of bubbles in the glass film laminate except for the peripheral part is not less than 0.1/m2 and not more than 10000/m2. ### Claim 20 (depends on 3) A method for manufacturing an electronic device comprising: a laminating step in which a glass film is laminated on a support body so as to produce the glass film laminate before a manufacturing relevant process of the electronic device; a step in which the manufacturing relevant process of the electronic device is performed to the glass film of the glass film laminate so as to form an element on the glass film of the glass film laminate and the element is closed by a closing substrate, thereby producing the electronic device with the support body; and a step in which the glass film of the electronic device with the support body after the manufacturing relevant process of the electronic device is exfoliated from the support body so as to manufacture the electronic device, characterized in that in the laminating step, the glass film laminate is produced by the method for manufacturing the glass film laminate according to claim 3. ### Claim 21 (depends on 4) A method for manufacturing an electronic device comprising: a laminating step in which a glass film is laminated on a support body so as to produce the glass film laminate before a manufacturing relevant process of the electronic device; a step in which the manufacturing relevant process of the electronic device is performed to the glass film of the glass film laminate so as to form an element on the glass film of the glass film laminate and the element is closed by a closing substrate, thereby producing the electronic device with the support body; and a step in which the glass film of the electronic device with the support body after the manufacturing relevant process of the electronic device is exfoliated from the support body so as to manufacture the electronic device, characterized in that in the laminating step, the glass film laminate is produced by the method for manufacturing the glass film laminate according to claim 4.