# US 10,246,318 B2 · Micromechanical component and production method for a micromechanical component > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,246,318 B2 - Document ID: US10246318B2 - Status: Granted - Kind: B2 - Application number: 15/702,034 - Filed: 2017-09-12 - Published: 2018-03-15 - Granted: 2019-04-02 - Earliest claimed: 2016-09-13 - Assignees: Robert Bosch GmbH - Applicants: Robert Bosch GmbH - Inventors: Helmut Grutzeck; Jochen Reinmuth - Web page: https://patentgrep.com/patent/US10246318B2 ## CPC - B81B 3/0037: {For increasing stroke, i.e. achieve large displacement of actuated parts} - B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)} - G01L 9/0072: {using variations in capacitance} - H02N 1/008: {Laterally driven motors, e.g. of the comb-drive type} - H04R 19/005: {using semiconductor materials} - H04R 19/04: Microphones (H04R19/01 takes precedence) - B81B 2201/0257: Microphones or microspeakers - B81B 2201/0264: Pressure sensors - B81B 2201/033: Comb drives - B81B 2203/0127: Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function - B81B 2203/0172: Flexible holders not provided for in B81B2203/0154 - B81B2203/0163 - B81B 2203/04: Electrodes - H04R 2201/003: Mems transducers or their use - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) ## Abstract A micromechanical component having a substrate, a membrane that covers an opening structured into the substrate from a first side of the substrate and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate, and having at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode can be displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate. A production method for a micromechanical component is also described. ## Claims ### Claim 1 A micromechanical component, comprising: a substrate; a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate; wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate. ### Claim 2 (depends on 1) The micromechanical component as recited in claim 1, wherein the at least one actuator electrode is connected to the membrane via a respective first torsion spring and a respective second torsion spring as the at least one torsion spring. ### Claim 3 (depends on 2) The micromechanical component as recited in claim 2, wherein a first height of the at least one first torsion axis of the at least one first torsion spring from the second side of the substrate differing from a second height of the at least one second torsion axis of the at least one second torsion spring from the second side of the substrate, the first and second torsion axis running parallel to the second side of the substrate. ### Claim 4 (depends on 3) The micromechanical component as recited in claim 3, wherein a distance of the at least one first torsion axis of the at least one first torsion spring from the second torsion axis of its associated second torsion spring is smaller than fifteen times a difference between the first height and the second height, the first torsion axis and the second torsion axis being oriented parallel to one another. ### Claim 5 (depends on 1) The micromechanical component as recited in claim 1, wherein the at least one actuator electrode is connected to the substrate in each case by at least one of a U-shaped spring and a meander-shaped spring, in such a way that a displacement movement, oriented perpendicular to the second side of the substrate, of the at least one actuator electrode is prevented by the at least one of the U-shaped spring and the meander-shaped spring. ### Claim 6 (depends on 1) The micromechanical component as recited in claim 1, wherein the at least one actuator electrode is in each case a comb electrode having electrode fingers oriented at least one of along its axis of displacement and parallel to its axis of displacement. ### Claim 7 (depends on 1) The micromechanical component as recited in claim 1, wherein the at least one actuator electrode is, in each case, a comb electrode having electrode fingers oriented perpendicular to its axis of displacement. ### Claim 8 (depends on 1) The micromechanical component as recited in claim 1, wherein the micromechanical component has exactly two actuator electrodes as the at least one actuator electrode, and the membrane being centrically sectioned by a plane of symmetry relative to which the two actuator electrodes are mirror-symmetrical. ### Claim 9 A microphone having a micromechanical component, the micromechanical component comprising: a substrate; a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate; wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate. ### Claim 10 A pressure sensor having a micromechanical component, the micromechanical component comprising: a substrate; a membrane that covers an opening structured into the substrate from a first side of the substrate, and that can be warped by a pressure difference between the first side of the substrate and a second side, oriented away from the first side, of the substrate; and at least one actuator electrode that is connected at least to the membrane in such a way that the at least one actuator electrode is displaced relative to the substrate by a warping of the membrane, the at least one actuator electrode being capable of being displaced relative to the substrate by the warping of the membrane, in each case along a displacement axis oriented parallel to the second side of the substrate; wherein the at least one actuator electrode is connected to the membrane at least by at least one torsion spring that is capable of being rotated about a respective torsion axis by the warping of the membrane, in such a way that the at least one actuator electrode is capable of being displaced relative to the substrate by the warping of the membrane, in each case along its axis of displacement oriented parallel to the second side of the substrate.