# US 10,245,701 B2 · 3D magnetorheological polishing device and magnetorheological polishing fluid

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- Number: US 10,245,701 B2
- Document ID: US10245701B2
- Status: Granted
- Kind: B2
- Application number: 15/497,988
- Filed: 2017-04-26
- Published: 2018-07-19
- Granted: 2019-04-02
- Earliest claimed: 2017-01-13
- Assignees: Kunshan Nano New Material Technology Co., Ltd.
- Applicants: Kunshan Nano New Material Technology Co., Ltd.
- Inventors: Hung-Tu Lu; Wu-Chu Shih; Wei-Nung Hsu; Dingai Xiang
- Web page: https://patentgrep.com/patent/US10245701B2

## CPC

- B24B 31/102: {using an alternating magnetic field}
- C09G 1/02: containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)}
- C09K 3/1409: {Abrasive particles per se (preparation of diamond C01B32/25)}
- C09K 3/1463: {Aqueous liquid suspensions}
- C09K 3/1472: {Non-aqueous liquid suspensions}
- H01F 1/447: {characterised by magnetoviscosity, e.g. magnetorheological, magnetothixotropic, magnetodilatant liquids (electrorheological fluids C10M171/001)}
- B24B: MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING (grinding of gear teeth B23F, of screw-threads B23G1/36; by electro-erosion B23H; abrasive or related blasting B24C; tools for grinding, buffing or sharpening B24D; polishing compositions C09G1/00; abrasives C09K3/14; electrolytic etching or polishing C25F3/00; grinding arrangements for use on assembled railway tracks E01B31/17); DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- C09G: POLISHING COMPOSITIONS (French polish C09F11/00); SKI WAXES
- C09K: MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A 3D magnetorheological polishing device and a magnetorheological polishing fluid are provided. The 3D magnetorheological polishing device includes a container and a magnetic field generator. The container is disposed with an accommodation space to accommodate a polishing fluid and a workpiece that is to be polished. The container is disposed on the magnetic field generator and rotates synchronously with the magnetic field generator. The container and the magnetic field generator are capable of rotating in conjunction at a predetermined speed, such that the polishing efficiency is improved.

## Claims

### Claim 1

A 3D magnetorheological polishing device, comprising:
a container, the container being disposed with an accommodation space to accommodate a polishing fluid and a workpiece awaiting polishing; and
a magnetic field generator, the container being disposed on the magnetic field generator and being configured to rotate synchronously with the magnetic field generator, wherein a rotational speed thereof ranges from 0 to 300 RPM;
wherein a magnetic field generated by the magnetic field generator is distributed evenly around the accommodation space, and a magnetic field strength at a vertical height of 6-10 cm from a surface of the container is no lower than 0.2 T.

### Claim 2

A 3D magnetorheological polishing device, comprising:
a container, the container being disposed with an accommodation space to accommodate a polishing fluid and a workpiece awaiting polishing; and
a magnetic field generator, the container being disposed on the magnetic field generator and being configured to rotate synchronously with the magnetic field generator, wherein a rotational speed thereof ranges from 0 to 300 RPM;
wherein the polishing fluid comprises: a carrier fluid, magnetic particles, abrasives, and additives; the carrier fluid is water-based or non-water-based and a content thereof is 28-38 wt %, a content of the magnetic particles is 50-60 wt %, a content of the abrasives is 2-12 wt %, and a content of the additives is 0.1-1 wt %.

### Claim 3 (depends on 2)

The 3D magnetorheological polishing device of claim 2, wherein the magnetic particles are made of carbonyl iron powder with particle size of 1-10 μm and carbonyl iron-nickel alloy powder with particle size of 1-5 μm, at a ratio of 9:1.

### Claim 4 (depends on 2)

The 3D magnetorheological polishing device of claim 2, wherein the abrasives are colloidal silica with particle size of 110-130 nm, and the abrasives are selected from one of mono-crystalline diamond, polycrystalline diamond, aluminum oxide, silicon carbide, iron(III) oxide, silicon oxide, and cerium(IV) oxide, or a combination thereof.

### Claim 5 (depends on 2)

The 3D magnetorheological polishing device of claim 2, wherein the additives comprise a dispersant, a suspending agent, a surfactant, a lubricant, and an antioxidant.

### Claim 6 (depends on 1)

The 3D magnetorheological polishing device of claim 1, further comprising a control device that is electrically connected to the magnetic field generator, wherein the control device controls a polishing duration, the magnetic field strength, a rotational direction of the magnetic field, and the rotational speed thereof.

### Claim 7 (depends on 1)

The 3D magnetorheological polishing device of claim 1, further comprising a holding mechanism, wherein the holding mechanism includes a main shaft and a clamp, the main shaft has a plurality of degrees of freedom for movements thereof, the clamp is rotatably connected to the main shaft and is configured to hold the workpiece.

### Claim 8 (depends on 7)

The 3D magnetorheological polishing device of claim 7, further comprising a control device that is electrically connected to the holding mechanism to control a movement trajectory of the holding mechanism.

### Claim 9

A magnetorheological polishing fluid, comprising:
a carrier fluid,
magnetic particles,
abrasives, and
additives;
wherein the carrier fluid is water-based or non-water-based and a content thereof is 28-38 wt %, a content of the magnetic particles is 50-60 wt %, a content of the abrasives is 2-12 wt %, and a content of the additives is 0.1-1 wt %;
the magnetic particles are made of carbonyl iron powder with particle size of 1-10 μm and carbonyl iron-nickel alloy powder with particle size of 1-5 μm, at a ratio of 9:1;
the abrasives are colloidal silica with particle size of 110-130 nm, and the abrasives are selected from one of mono-crystalline diamond, polycrystalline diamond, aluminum oxide, silicon carbide, iron(III) oxide, silicon oxide, and cerium(IV) oxide, or a combination thereof;
the additives comprise a dispersant, a suspending agent, a surfactant, a lubricant, and an antioxidant.