# US 10,245,588 B2 · Providing DEP manipulation devices and controllable electrowetting devices in the same microfluidic apparatus

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- Number: US 10,245,588 B2
- Document ID: US10245588B2
- Status: Granted
- Kind: B2
- Application number: 15/637,159
- Filed: 2017-06-29
- Published: 2018-05-10
- Granted: 2019-04-02
- Earliest claimed: 2014-04-25
- Assignees: Berkeley Lights, Inc.
- Applicants: Berkeley Lights, Inc.
- Inventors: Igor Y. Khandros; Daniele Malleo; J. Tanner Nevill; Steven W. Short; Ming C. Wu
- Web page: https://patentgrep.com/patent/US10245588B2

## CPC

- B01L 3/502761: {specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads or physically stretching molecules}
- B01L 3/502792: {for moving individual droplets on a plate, e.g. by locally altering surface tension}
- B03C 5/005: {Dielectrophoresis, i.e. dielectric particles migrating towards the region of highest field strength}
- B03C 5/026: {using open-gradient differential dielectric separation, i.e. using electrodes of special shapes for non-uniform field creation, e.g. Fluid Integrated Circuit [FIC]}
- B01L 2200/0647: Handling flowable solids, e.g. microscopic beads, cells, particles
- B01L 2300/0816: Cards, e.g. flat sample carriers usually with flow in two horizontal directions
- B01L 2300/0819: Microarrays; Biochips
- B01L 2400/0424: Dielectrophoretic forces
- B01L 2400/0427: Electrowetting
- B03C 2201/26: for use in medical or biological applications
- B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B03C: MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS (separating isotopes B01D59/00; combinations of magnetic or electrostatic separation with separation of solids by other means B03B, B07B)

## Abstract

A structure for providing a boundary for a chamber in a microfluidic apparatus can comprise dielectrophoresis (DEP) configurations each having an outer surface and electrowetting (EW) configurations each having an electrowetting surface. The DEP configurations can facilitate generating net DEP forces with respect to the outer surfaces of the DEP configurations to move micro-objects on the outer surfaces, and the EW configurations can facilitate changing wetting properties of the electrowetting surfaces to move droplets of liquid medium on the electrowetting surfaces.

## Claims

### Claim 1

A process of operating a microfluidic apparatus comprising a chamber, dielectrophoresis (DEP) devices, and electrowetting (EW) devices, said process comprising:
moving a micro-object from a first outer surface of a first of said DEP devices to a second outer surface of a second of said DEP devices by activating said second DEP device and thereby creating a net DEP force on said micro-object in a direction of said second DEP device; and
moving a droplet of a liquid medium from a first location to a second location in said chamber by activating a second set of said EW devices and thereby changing a wetting property of second electrowetting surfaces of said second set of EW devices,
wherein:
in said first location said droplet is disposed in part on first electrowetting surfaces of a first set of said EW devices but not on said second electrowetting surfaces of said second set of EW devices, and
in said second location said droplet is disposed in part on said second electrowetting surfaces of said second set of EW devices but not on said first electrowetting surfaces of said first set of EW devices.

### Claim 2 (depends on 1)

The process of claim 1, wherein moving said droplet comprises moving part of said droplet over an outer surface of one of said DEP devices disposed between said first set of EW devices and said second set of EW devices.

### Claim 3 (depends on 2)

The process of claim 2, wherein:
said outer surface of said one of said DEP devices is hydrophilic, and
said first electrowetting surfaces and said second electrowetting surfaces are hydrophobic.

### Claim 4 (depends on 3)

The process of claim 3, wherein changing said wetting property of said second electrowetting surfaces comprises temporarily reducing a hydrophobicity of said second electrowetting surfaces.

### Claim 5 (depends on 3)

The process of claim 3, wherein changing said wetting property of said second electrowetting surfaces comprises temporarily changing said second electrowetting surfaces from hydrophobic to hydrophilic.

### Claim 6 (depends on 1)

The process of claim 1, wherein moving said micro-object comprises moving said micro-object from said first outer surface across an electrowetting surface of an adjacent one of said first set of EW devices to said second outer surface.

### Claim 7 (depends on 1)

The process of claim 1, wherein:
a structural boundary of said chamber comprises said first outer surface, said second outer surface, said first electrowetting surfaces, and said second electrowetting surfaces.

### Claim 8 (depends on 1)

The process of claim 1, further comprising performing both of said moving steps substantially simultaneously.

### Claim 9 (depends on 1)

The process of claim 1, wherein:
said micro-object is disposed in said droplet, and
moving said droplet further comprises said micro-object moving with said droplet.

### Claim 10

A process of manipulating a droplet of liquid medium in a microfluidic apparatus comprising a chamber, dielectrophoresis (DEP) devices, and electrowetting (EW) devices, said process comprising:
disposing a droplet of a first liquid medium on first outer surfaces of a first set of said DEP devices and first electrowetting surfaces of a first set of said EW devices;
separating a first part of said droplet from a second part of said droplet by activating second electrowetting surfaces of a second set of said EW devices and thereby changing a wetting property of said second electrowetting surfaces.

### Claim 11 (depends on 10)

The process of claim 10, wherein said separating comprises moving said first part of said droplet from a first location comprising said first outer surfaces of said first set of said DEP devices and said first set of electrowetting surfaces of said first EW devices to a second location comprising second outer surfaces of a second set of said DEP devices and said second electrowetting surfaces of said second set of said EW devices.

### Claim 12 (depends on 11)

The process of claim 11, wherein said separating comprises:
activating third electrowetting surfaces of a third set of said EW devices disposed between said first set of said EW devices and said second set of said EW devices, and
thereafter activating said second electrowetting surfaces of said second set of EW devices.

### Claim 13 (depends on 12)

The process of claim 12, wherein:
none of said DEP devices in said second set of DEP devices is also in said first set of DEP devices,
none of said EW devices in said second set of EW devices is also in said first set of EW devices or said third set of EW devices, and
none of said EW devices in said first set of EW devices is also in said third set of EW devices.

### Claim 14 (depends on 12)

The process of claim 12, wherein said second location is separated from and does not overlap said first location.

### Claim 15 (depends on 11)

The process of claim 11, wherein separating said first part of said droplet comprises a first group of micro-objects disposed in said first part of said droplet moving with said first part of said droplet from said first location to said second location.

### Claim 16 (depends on 15)

The process of claim 15 further comprising, prior to said separating said first part of said droplet, selecting said first group of micro-objects from a larger group of micro-objects in said droplet.

### Claim 17

A structure comprising:
a dielectrophoresis (DEP) configuration comprising an outer surface, a first electrode, and a first switchable element disposed between said outer surface and said first electrode, wherein said first switchable element is configured to temporarily create an electrically conductive first path from a first region of said outer surface through said first switchable element to said first electrode; and
an electrowetting (EW) configuration comprising an electrowetting surface, a second electrode, a dielectric layer disposed between said electrowetting surface and said second electrode, and a second switchable element disposed between said dielectric layer and said second electrode, wherein said second switchable element is configured to temporarily create an electrically conductive second path through said second switchable element and thereby change a wetting property of a second region of said electrowetting surface adjacent to said second path,
wherein said DEP configuration is disposed adjacent to said EW configuration such that said outer surface of said DEP configuration is adjacent to said electrowetting surface,
wherein said first switchable element of said DEP configuration comprises a first switch from said first region of said outer surface through said first switchable element to said first electrode; and/or,
wherein said second switchable element of said EW configuration comprises a second switch from said second region of said electrowetting surface through said second switchable element to said second electrode.

### Claim 18 (depends on 17)

The structure of claim 17, wherein:
said first switchable element of said DEP configuration comprises a photoconductive material, and
selectively illuminating a portion of said photoconductive material adjacent to said first region reduces an impedance of said portion creating said first path; and/or,
said second switchable element of said EW configuration comprises a photoconductive material;
and selectively illuminating a portion of said photoconductive material adjacent to said second region changes said wetting property of said second region of said electrowetting surface adjacent to said second path.

### Claim 19 (depends on 18)

The structure of claim 18, wherein said first switchable element of said DEP configuration is light activated.

### Claim 20 (depends on 18)

The structure of claim 18, wherein said second switchable element of said EW configuration is light activated.

### Claim 21 (depends on 17)

The structure of claim 17, wherein said first switch and/or said second switch is light activated.

### Claim 22 (depends on 17)

The structure of claim 17, wherein said first switch comprises a first transistor embedded in said first switchable element; and/or,
wherein said second switch comprises a second transistor embedded in said second switchable element.

### Claim 23 (depends on 17)

The structure of claim 17, wherein said first switchable element further comprises isolation barriers in said first switchable element about said first switch; and/or,
said second switchable element further comprises isolation barriers in said second switchable element about said second switch.

### Claim 24 (depends on 23)

The structure of claim 23, wherein said second switchable element of said EW configuration comprises photoconductive material disposed in said isolation barriers.

### Claim 25 (depends on 17)

The structure of claim 17, wherein said outer surface of said DEP configuration is substantially parallel to said electrowetting surface of said EW configuration.

### Claim 26 (depends on 25)

The structure of claim 25, further comprising a monolithic component, wherein:
a first section of said monolithic component comprises said first switchable element of said DEP configuration, and
a second section of said monolithic component comprises said second switchable element of said EW configuration.

### Claim 27 (depends on 25)

The structure of claim 25, further comprising a support structure, wherein:
a first section of said support structure comprises said first switchable element of said DEP configuration, and
said EW configuration is disposed in a cavity in a second section of said support structure adjacent to said first section.

### Claim 28 (depends on 17)

The structure of claim 17, wherein:
said DEP configuration is a first distinct device, and
said EW configuration is a second distinct device disposed adjacent to said DEP configuration, and
said outer surface of said DEP configuration is substantially parallel to said electrowetting surface of said EW configuration.

### Claim 29 (depends on 17)

The structure of claim 17, wherein said outer surface of said DEP configuration and said electrowetting surface of said EW configuration are substantially parallel.

### Claim 30 (depends on 29)

The structure of claim 29, wherein said outer surface of said DEP configuration and said electrowetting surface of said EW configuration are substantially in a same plane.

### Claim 31 (depends on 29)

The structure of claim 29, wherein said outer surface of said DEP configuration and said electrowetting surface of said EW configuration form a substantially continuous composite surface.

### Claim 32 (depends on 17)

The structure of claim 17, further comprising:
a plurality of said DEP configurations each comprising an outer surface, and
a plurality of said EW configurations each comprising an electrowetting surface,
wherein at least some of said DEP configurations and some of said EW configurations are disposed such that said outer surfaces and said electrowetting surfaces are in alternating patterns.

### Claim 33 (depends on 32)

The structure of claim 32, wherein said outer surfaces of said DEP configurations and said electrowetting surfaces of said EW configurations are substantially in a same plane.

### Claim 34 (depends on 32)

The structure of claim 32, wherein said outer surfaces of said DEP configurations and said electrowetting surfaces of said EW configurations form a substantially continuous composite surface.

### Claim 35 (depends on 32)

The structure of claim 32, wherein:
said outer surfaces of said DEP configurations are hydrophilic, and
said electrowetting surfaces of said EW configurations are hydrophobic.