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US 10,245,554 B2Granted
Gas purifier
AssigneeEntegris, Inc.
InventorsAbneesh Srivastava, Thomas Richard Gaffney, Joshua T. Cook, Peter K. Shorgen, Daimhin Paul Murphy, Stenio da Costa Pereira
Life of this patent
Estimating the term…
Abstract
The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.
Claims13
A gas purifier, comprising:
- a housing having a fluid inlet and a fluid outlet, the inlet and outlet fluidly connected through a purifier bed contained in the housing, the purifier bed comprising:
- a first bed of purification media;
- a second bed of purification media downstream of the first bed of purification media;
- and
- a media-retaining, porous, gas-permeable membrane separating the first bed of purification media and the second bed of purification media, wherein the media-retaining, porous, gas-permeable membrane has a pore size to prevent particles of purification media from passing therethrough, the media-retaining, porous, gas-permeable membrane being secured at its edges to an inner surface of the housing;
- and
- an expandable ring comprising an inner circumference, an outer circumference and a locking mechanism for expanding and retaining the ring by radial force against an inner wall of the housing when the locking mechanism is engaged,
- wherein the first bed of purification media and the second bed of purification media are compositionally different and wherein the media-retaining, porous, gas-permeable membrane is secured to the inner surface of the housing at its edges by the expandable ring.
5 more elements
Dependencies are inferred from the claim text.