# US 10,245,333 B2 · Plasma generating apparatus and treatment method using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,245,333 B2 - Document ID: US10245333B2 - Status: Granted - Kind: B2 - Application number: 15/241,796 - Filed: 2016-08-19 - Published: 2017-02-23 - Granted: 2019-04-02 - Earliest claimed: 2015-08-19 - Assignees: Electronics and Telecommunications Research Institute - Applicants: Electronics and Telecommunications Research Institute - Inventors: Han Young Yu; Yark Yeon Kim; Won Ick Jang; Yong Sun Yoon; Bong Kuk Lee - Web page: https://patentgrep.com/patent/US10245333B2 ## CPC - A61L 2/02: using physical processes - A61L 2/20: Gaseous substances, e.g. vapours - A61N 1/44: Applying ionised fluids {(ion generators H01J37/00)} - A61L 2103/05: Living organisms or biological materials - A61L 2202/13: Biocide decomposition means, e.g. catalysts, sorbents - A61L: METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES (preservation of bodies or disinfecting characterised by the agents employed A01N; preserving, e.g. sterilising, food or foodstuffs A23; preparations for medical, dental or toiletry purposes A61K) - A61N: ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY (measurement of bioelectric currents A61B; surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body A61B18/00; anaesthetic apparatus in general A61M; incandescent lamps H01K; infrared radiators for heating H05B) ## Abstract A plasma generating apparatus according to embodiments of the inventive concept, which provides plasma to a biological material, includes a housing configured to provide an inner space in which plasma is generated, a ground electrode coupled to one side of the housing, a power electrode coupled to the other side of the housing, and a controller configured to control a generation mode of the plasma. The generation mode includes a first mode in which the plasma is provided to the biological material while generating the plasma and a second mode in which the plasma is generated in the housing, and then the generated plasma is provided to the biological material. ## Claims ### Claim 1 A plasma generating apparatus comprising: a housing configured to provide an inner space in which plasma is generated; a ground electrode coupled to one side of the housing; a power electrode coupled to the other side of the housing; and a controller configured to control a generation mode of the plasma, wherein the generation mode comprises: a first mode in which the plasma is provided to a target to be processed while generating the plasma; and a second mode in which the plasma is generated in the housing, and then the generated plasma is provided to the target to be processed. ### Claim 2 (depends on 1) The plasma generating apparatus of claim 1, wherein, in the first mode, an electric field formed between the power electrode and the target to be processed is greater than that formed between the power electrode and the ground electrode, and in the second mode, the electric field formed between the power electrode and the target to be processed is less than that formed between the power electrode and the ground electrode. ### Claim 3 (depends on 2) The plasma generating apparatus of claim 2, further comprising an adjusting device configured to adjust a distance between the ground electrode and the power electrode, wherein the controller controls the adjusting device. ### Claim 4 (depends on 3) The plasma generating apparatus of claim 3, wherein the controller controls the adjusting device to be positioned between a first position at which a first distance between the power electrode and the target to be processed is less than a second distance between the power electrode and the ground electrode and a second position at which the first distance is greater than the second distance. ### Claim 5 (depends on 2) The plasma generating apparatus of claim 2, wherein the housing comprises: an injection port through which a process gas for generating the plasma is injected into the inner space; and a discharge port through which the plasma is discharged from the inner space, wherein the injection port, the ground electrode, the power electrode, and the discharge port are arranged in a first direction. ### Claim 6 (depends on 5) The plasma generating apparatus of claim 5, wherein, in a cross-section extending in the first direction of the housing, the ground electrode is disposed so that a distance between the ground electrode and the power electrode increases as the ground electrode is away from a surface of the housing. ### Claim 7 (depends on 5) The plasma generating apparatus of claim 5, wherein one portion of the housing, which is disposed adjacent to the injection port, has a first width, and another portion of the housing, which is disposed adjacent to the discharge port, has a second width greater than the first width. ### Claim 8 (depends on 7) The plasma generating apparatus of claim 7, wherein the second width is continuously widened from the first width in the first direction. ### Claim 9 (depends on 7) The plasma generating apparatus of claim 7, wherein the second width is discontinuously widened from the first width in the first direction. ### Claim 10 (depends on 2) The plasma generating apparatus of claim 2, further comprising an ozone removing part configured to remove ozone generated when the plasma is generated. ### Claim 11 (depends on 10) The plasma generating apparatus of claim 10, wherein the ozone removing part comprises: a chamber configured to provide a collection space in which the ozone is collected; a fan disposed on one side of the chamber to form an inside of the collection space at a low pressure; and a filter configured to filter the collected ozone. ### Claim 12 (depends on 2) The plasma generating apparatus of claim 2, further comprising a window disposed on a surface of the housing. ### Claim 13 A plasma generating apparatus comprising: a housing configured to provide an inner space in which plasma is generated; a ground electrode coupled to one side of the housing; a power electrode coupled to the other side of the housing; an adjusting device configured to adjust a distance between the ground electrode and the power electrode; and a controller configured to control the adjusting device, wherein the controller controls the adjusting device to be positioned between a first position at which a first distance between the power electrode and a target to be processed is less than a second distance between the power electrode and the ground electrode and a second position at which the first distance is greater than the second distance. ### Claim 14 (depends on 13) The plasma generating apparatus of claim 13, wherein the housing comprises: an injection port through which a process gas for generating the plasma is injected into the inner space; and a discharge port through which the plasma is discharged from the inner space, and the ground electrode is disposed between the injection port and the power electrode. ### Claim 15 (depends on 13) The plasma generating apparatus of claim 13, further comprising an ozone removing part configured to remove ozone generated when the plasma is generated. ### Claim 16 (depends on 15) The plasma generating apparatus of claim 15, wherein the ozone removing part comprises: a chamber configured to provide a collection space in which the ozone is collected; a fan disposed on one side of the chamber to form an inside of the collection space at a low pressure; and a filter configured to filter the collected ozone. ### Claim 17 (depends on 14) The plasma generating apparatus of claim 14, wherein one portion of the housing, which is disposed adjacent to the injection port, has a first width, and another portion of the housing, which is disposed adjacent to the discharge port, has a second width greater than the first width. ### Claim 18 (depends on 14) The plasma generating apparatus of claim 14, further comprising a window disposed on a surface of the housing.