Materials containing metal oxides, processes for making same, and processes for using same
AssigneeAz Electronic Materials (Luxembourg) S.A.R.L.
InventorsHuirong Yao, M. Dalil Rahman, Douglas McKenzie, JoonYeon Cho
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Abstract
Compositions having a high metal content comprising a metal salt solution, a stabilizer and one or more optional additives, wherein the metal salt solution comprises a metal ion, a counter ion and a solvent. The compositions are useful for forming films on substrates in the manufacture of solid state and integrated circuit devices.
Claims13
A composition comprising:
- a metal salt solution comprising:
- a metal ion selected from the group consisting of Zr, Al, Ti, Hf, W, Mo, Sn, In, Ga, Zn and combinations thereof;
- and
- a counter ion selected from the group consisting of nitrates, sulfates, acetates, fluorinated alkylacetates, fluorinated alkylsulfonates, acrylates, methacrylates and combinations thereof;
- and
- a solvent;
- a stabilizer comprising a lactone, wherein the stabilizer is present in the composition at a content of not more than 10 wt %;
- and
- an optional additive selected from the group consisting of catalysts, crosslinkers, photoacid generators, organic polymers, inorganic polymers, surfactants, wetting agents, anti-foam agents, thixotropic agents and combinations thereof.
A process for making an aluminum trifuoromethylsulfonate composition comprising the step of dissolving aluminum trifluoromethylsulfonate in a mixture comprising a solvent and a lactone to form a solution of aluminum trifluoromethylsulfonate in the mixture comprising the lactone and the solvent.
A process for coating a substrate comprising the steps of:
- applying a composition on the substrate;
- and
- heating the coated substrate to form a cured film,
- wherein the composition comprises:
- a metal salt solution comprising:
- a metal ion selected from the group consisting of Ti, Zr, Hf, W, Mo, Sn, Al, In, Ga, Zn and combinations thereof;
- and
- a counter ion selected from the group consisting of nitrates, sulfates, acetates, fluorinated alkylacetates, fluorinated alkylsulfonates, acrylates, methacrylates and combinations thereof;
- and
- a solvent;
- a stabilizer comprising a lactone, wherein the stabilizer is present in the composition at a content of not more than 10 wt %;
- and
- an optional additive selected from the group consisting of catalysts, crosslinkers, photoacid generators, organic polymers, inorganic polymers, surfactants, wetting agents, anti-foam agents, thixotropic agents and combinations thereof.
Dependencies are inferred from the claim text.