Resist composition and method for forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMasahito Yahagi, Issei Suzuki, Yuki Fukumura, Toshikazu Takayama, Takashi Kamizono, Tatsuya Fujii
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsMasahito Yahagi, Issei Suzuki, Yuki Fukumura, Toshikazu Takayama, Takashi Kamizono, Tatsuya Fujii
Estimating the term…
A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va1 is a divalent hydrocarbon group. na1 represents an integer of 0 to 2. Ra′12 and Ra′13 are a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Ra′14 is a phenyl group, a naphthyl group, or an anthryl group. In general formula (b1), Rb1 represents a cyclic hydrocarbon group. Yb1 represents a divalent linking group containing an ester bond. Vb1 represents an alkylene group, a fluorinated alkylene group, or a single bond. m is an integer of 1 or more, and Mm+ is an m-valent organic cation.
A resist composition which generates an acid upon exposure and whose solubility in a developing solution changes under an action of the acid, the resist composition comprising:
A resist composition which generates an acid upon exposure and whose solubility in a developing solution changes under an action of the acid, the resist composition comprising:
Dependencies are inferred from the claim text.