Pattern correction amount calculating apparatus, pattern correction amount calculating method, and storage medium

A pattern correction amount calculating method performed using an accepting unit, a micro side group acquiring unit, a virtual side acquiring unit, a virtual side correction amount calculating unit, a micro side correction amount calculating unit, and an output unit, comprising:

• an accepting step of the accepting unit accepting pattern information, which is information indicating a pattern figure that is to be written by an electron beam writer;
• a micro side group acquiring step of the micro side group acquiring unit acquiring a micro side group, which is a group of two or more continuous sides forming a contour of the pattern figure indicated by the pattern information, and is a group of micro sides that are each small enough to satisfy a predetermined condition, using the pattern information;
• a virtual side acquiring step of the virtual side acquiring unit acquiring a virtual side, which is a side that approximates two or more micro sides contained in the micro side group;
• a virtual side correction amount calculating step of the virtual side correction amount calculating unit calculating a virtual side correction amount, which is a correction amount for the virtual side and is information regarding a change of position of an entirety of the virtual side;
• a micro side correction amount calculating step of the micro side correction amount calculating unit calculating, using the virtual side correction amount, two or more micro side correction amounts, which are correction amounts respectively for the two or more micro sides contained in the micro side group corresponding to the virtual side, are correction amounts according to the vertical side correction amount and are information regarding a change of a position of an entirety of each of the two or more micro sides;
• and
• an output step of the output unit outputting the two or more micro side correction amounts.

A non-transitory computer readable storage medium in which a program is stored, the program causing a computer to function as:

• an accepting unit that accepts pattern information, which is information indicating a pattern figure that is to be written by an electron beam writer;
• a micro side group acquiring unit that acquires a micro side group, which is a group of two or more continuous sides forming a contour of the pattern figure indicated by the pattern information, and is a group of micro sides that are each small enough to satisfy a predetermined condition, using the pattern information;
• a virtual side acquiring unit that acquires a virtual side, which is a side that approximates two or more micro sides contained in the micro side group;
• a virtual side correction amount calculating unit that calculates a virtual side correction amount, which is a correction amount for the virtual side and is information regarding a change of position of an entirety of the virtual side;
• a micro side correction amount calculating unit that calculates, using the virtual side correction amount, two or more micro side correction amounts, which are correction amounts respectively for the two or more micro sides contained in the micro side group corresponding to the virtual side, are correction amounts according to the vertical side correction amount and are information regarding a change of a position of an entirety of each of the two or more micro sides;
• and
• an output unit that outputs the two or more micro side correction amounts.