Thin film transistor, method for manufacturing the same, array substrate and display device
AssigneesBoe Technology Group Co., Ltd., Hefei Boe Optoelectronics Technology Co., Ltd.
InventorsHefei Li, Xianxue Duan, Chengcheng Wang
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Abstract
A thin film transistor, a method for manufacturing the same, an array substrate and a display device are provided. The method for manufacturing a thin film transistor includes: providing a substrate; forming an active layer and a light shielding layer covering the active layer on the substrate by a patterning process, the light shielding layer being formed of a photoresist material; and forming a source-drain electrode layer and a passivation layer covering the source-drain electrode layer.
Claims18
A method for manufacturing a thin film transistor, comprising:
- providing a substrate;
- forming an active layer and a light shielding layer covering the active layer on the substrate by a patterning process, the light shielding layer being formed of a photoresist material, wherein the step of forming an active layer and a light shielding layer covering the active layer on the substrate by a patterning process further comprises:
- depositing the active layer on the substrate;
- coating a photoresist layer on the active layer;
- and
- etching the active layer by using the photoresist layer as a mask, to obtain an active layer and the light shielding layer covering the active layer;
- and
- forming a source-drain electrode layer and a passivation layer covering the source-drain electrode layer.
A thin film transistor, comprising:
- a substrate;
- an active layer, formed on the substrate;
- and
- a light shielding layer, formed on the active layer away from the substrate and covering the active layer,
- wherein the light shielding layer is composed of a photoresist material;
- and
- wherein the active layer and the light shielding layer are formed by a patterning process, and the light shielding layer is served as a mask for forming the active layer.
Dependencies are inferred from the claim text.