Color film substrate, manufacturing method thereof and display device

A method for manufacturing a color film substrate;

• the color film substrate comprising a basal substrate, a plurality of color filters of at least one color formed on the basal substrate, and a black matrix formed on the basal substrate;
• the black matrix having a plurality of openings one-to-one corresponding to the plurality of color filters of at least one color;
• wherein the method comprises:
• forming the plurality of color filters of at least one color on the basal substrate with a halftone mask plate, the sum of a transparent region and a semi-transparent region of the halftone mask plate corresponding to a pattern of a color filter;
• and
• after forming the plurality of color filters of at least one color, forming the black matrix with the same halftone mask plate, the sum of the semi-transparent region and an opaque region of the halftone mask plate corresponding to a pattern of the black matrix.