Electro-optic modulator with a periodic junction arrangement
AssigneeInternational Business Machines Corporation
InventorDouglas Max Gill
Life of this patent
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Abstract
Techniques regard electro-optic modulators are provided. For example, one or embodiments described herein can regard an apparatus that can comprise a first lateral region, a second lateral region, and a central region located on a semiconductor substrate. The first lateral region can be adjacent to a first side of the central region and can have a first conductivity type. The second lateral region can be adjacent to a second side of the central region and can have a second conductivity type. Also, the first side can be opposite to the second side. Further, the central region can comprise a diode junction adjacent to an intrinsic region. The intrinsic region can separate the first lateral region and the second lateral region.
Claims20
An electro-optic modulator apparatus comprising:
- an optical waveguide extending along a longitudinal direction;
- and
- a first lateral region, a second lateral region, and a central region located on a semiconductor substrate and extending along a first direction transverse to the longitudinal direction, the first lateral region being adjacent to a first side of the central region and having a first conductivity type, the second lateral region being adjacent to a second side of the central region and having a second conductivity type, the first side being opposite to the second side, and the central region comprising a first diode junction, a second diode junction, and an intrinsic region that separates the first diode junction and the second diode junction along the longitudinal direction.
A method comprising:
- implanting a first dopant of a first conductivity type into a first portion of the semiconductor substrate to form a first conductivity layer;
- implanting a second dopant of a second conductivity type into a second portion of the semiconductor substrate and at least a first portion of the first conductivity layer to form a second conductivity layer, wherein a portion of the second conductivity layer overlaps a second portion of the first conductivity layer to form at least two diode junctions;
- and
- forming an intrinsic region of the semiconductor substrate separating respective junction diodes of the at least two diode junctions along a longitudinal direction of an optical waveguide.
An electro-optic modulator apparatus comprising:
- an optical waveguide extending along a longitudinal direction;
- a junction zone;
- a first diode junction comprising a first layer having a first conductive type and a second layer having a second conductive type, wherein the first diode junction is located on a semiconductor substrate and within the junction zone;
- a second diode junction comprising the first layer and the second layer, wherein the second diode junction is located on the semiconductor substrate and within the junction zone;
- and
- an intrinsic region located on the semiconductor substrate and separating the first diode junction and the second diode junction along the longitudinal direction.
Dependencies are inferred from the claim text.