US 10,241,352 B2Granted

Integrated-optics-based stress-optic phase modulator and method for forming

AssigneeLioniX International BV

InventorsJörn Philipp Epping, Arne Leinse, René Gerrit Heideman

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Abstract

A phase controller for controlling the phase of a light signal in a surface waveguide and a method for its fabrication are disclosed. The phase controller controls the phase of the light signal by inducing stress in the waveguide structure, thereby controlling the refractive indices of at least some of its constituent layers. The phase controller includes a phase-control element formed on topographic features of the top cladding of the waveguide, where these features (1) provide a shape to the phase-control element that matches the shape of the mode field of the light signal and (2) give rise to stress-concentration points that focus and direct induced stress into specific regions of the waveguide structure, thereby providing highly efficient phase control. As a result, the phase controller can operate at a lower voltage, lower power, and/or over a shorter interaction length than integrated-optic phase controllers of the prior art.

Claims14

Dependent claims

A method for forming a phase controller, the method comprising:

providing a waveguide that is operative for conveying a light signal having a mode field having a first shape, the waveguide comprising:
a first cladding having a first field region and a spine that projects from the first field region;
a core that is disposed on the spine, wherein the core has a first surface that defines a first plane, and wherein the core and the spine collectively define a ridge;
and
a second cladding that includes a second field region and a projection that projects from the second field region, wherein the second cladding is conformally disposed on the first field region and the ridge such that the ridge and the second cladding collectively define the projection, and wherein the second field region has a second surface that defines a second plane, and further wherein the projection has a third surface;
and
forming a phase-control (PC) element comprising:
a first electrode that is in direct contact with the third surface;
a second electrode that is distal to the third surface;
and
a piezoelectric layer that is between the first and second electrodes;
wherein the PC element includes a first stress-concentration point.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/875,340Filed 19 Jan 2018 · us provisional application
Priority: 19 Jan 2017
Published: US 2018/0203262 A119 Jul 2018
Granted: 26 Mar 2019
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

G02F 1/0134
Based on photo-elastic effects, e.g. mechanically induced birefringence: in optical waveguides
G02B 6/02076
Comprising gratings: refractive index modulation gratings, e.g. Bragg gratings
G02B 6/29353
In a light guide: with a wavelength selective element in at least one light guide interferometer arm, e.g. grating, interference filter, resonator
G02F 1/025
Based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction: in an optical waveguide structure