Self-aligned spatial filter
AssigneeIntegrated Plasmonics Corporation
InventorsMichael Yagoda Shagam, Robert Joseph Walters
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Abstract
A spatial filter is made by forming a structure comprising a focusing element and an opaque surface, the opaque surface being disposed remotely from the focusing element in substantially the same plane as a focal plane of the focusing element; and by forming a pinhole in the opaque surface at or adjacent to a focal point of the focusing element by transmitting a substantially collimated laser beam through the focusing element so that a point optimally corresponding to the focal point is identified on the opaque surface and imperfection of the focusing element, if any, is reflected on the shape and position of the pinhole so formed.
Claims8
A method for making a spatial filter, comprising:
- forming a structure having a focusing element and an opaque surface, the opaque surface being disposed remotely from the focusing element in substantially the same plane as a focal plane of the focusing element, the opaque surface having no pinhole yet formed therein;
- forming a self-aligned pinhole in the opaque surface at or adjacent to a focal point of the focusing element by transmitting a substantially collimated monochromatic laser light beam through the focusing element so that a point optimally corresponding to the focal point is identified on the opaque surface and any aberration or anomalies due to imperfection of the focusing element, if any, is reflected on the shape and position of the pinhole so formed, thereby making a spatial filter component constituted of the focusing element and the opaque surface with the self-aligned pinhole.
Dependencies are inferred from the claim text.