Total internal reflection microscope
AssigneeNikon Corporation
InventorsTakayuki Morita, Akitoshi Suzuki, Tomoko Kobayashi, Keita Masuda
Life of this patent
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AssigneeNikon Corporation
InventorsTakayuki Morita, Akitoshi Suzuki, Tomoko Kobayashi, Keita Masuda
Estimating the term…
The total internal reflection microscope has an illumination optical system that relays light from a light source with a relay optical system, forms an image of the light source on the incident pupil plane of the objective lens and irradiates a sample with the illumination light via an objective lens, has an angle adjustment mirror for changing the position of the image of the light source in a direction orthogonal to the optical axis, an optical detector for detecting the intensity of the returning illumination light reflected by the sample and collected by the objective lens, and a controller for determining the operation amount of the angle adjustment mirror, wherein the controller determines the operation amount of the angle adjustment mirror so that the illumination light is totally reflected at the sample based on the change in intensity of the returning light when the angle adjustment mirror is changed.
A total internal reflection microscope comprising an illumination optical system for relaying light from a light source with a relay optical system and forming an image of the light source on the incident pupil of an objective lens or the vicinity thereof and irradiating an observation object with the light through the objective lens, the total internal reflection microscope further comprising:
Dependencies are inferred from the claim text.