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US 10,241,269 B1Granted
Grating couplers with multiple configurations
AssigneeGlobalfoundries Inc.
InventorsAjey Poovannummoottil Jacob, Yusheng Bian
Life of this patent
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Abstract
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A structure includes: a grating coupler having a sawtooth configuration provided over a semiconductor slab; and a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler.
Claims17
A structure, comprising:
- a grating coupler having a sawtooth configuration provided over a semiconductor slab;
- and
- a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler wherein one of:
- the sawtooth configuration includes a top, planar surface for each sawtooth of the sawtooth configuration,
- the semiconductor slab includes a patterned sawtooth configuration or stepped configuration,
- the semiconductor slab includes a pattern aligned with each sawtooth of the sawtooth configuration of the grating coupler,
- the semiconductor slab includes a pattern which is offset from each sawtooth of the sawtooth configuration of the grating coupler, and
- the grating coupler is composed of the semiconductor slab and poly material, both of which form the sawtooth configuration.
5 more elements
A structure, comprising:
- a semiconductor slab;
- a dielectric material on the semiconductor slab;
- a grating coupler composed of at least:
- material having a sawtooth configuration provided over dielectric material;
- and
- a liner over the material;
- a second dielectric material on the liner;
- a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler;
- and
- a cladding material over the BEOL stack.
7 more elements
A structure, comprising:
- a semiconductor material;
- a dielectric material above the semiconductor material;
- a patterned grating coupler comprising a sawtooth configuration with a gap provided between teeth of the sawtooth configuration, the patterned grating coupler being provided above the semiconductor material and in the dielectric material;
- and
- a back end of line (BEOL) stack over the dielectric material,
- wherein one of:
- the sawtooth configuration includes a top, planar surface for each sawtooth of the sawtooth configuration,
- the semiconductor material includes a pattern comprising one of a sawtooth configuration and stepped configuration aligned with or offset from each sawtooth of the sawtooth configuration of the grating coupler, and
- the grating coupler is composed of the semiconductor material and poly material, both of which form the sawtooth configuration.
6 more elements
Dependencies are inferred from the claim text.