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US 10,241,268 B2Granted
Filling a cavity through a reservoir and a feed-channel and related apparatus and methods
AssigneeAcacia Communications, Inc.
InventorsLong Chen, Christopher Doerr
Life of this patent
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Abstract
Aspects of the present application provide an optical device comprising a suspended optical component over a cavity, such as an undercut region in a substrate. The cavity is filled with a filler material. In some embodiments, the optical device and a method may be provided to fill the cavity with the filler material using a reservoir and a channel in the substrate connecting the reservoir to the cavity to be filled.
Claims21
An optical device, comprising:
- a substrate;
- a first optical component suspended above a first cavity in the substrate;
- a second optical component suspended above a second cavity in the substrate;
- a reservoir in the substrate;
- a channel of smaller cross-section than the reservoir connecting the reservoir with the first and second cavities;
- and
- a cured filler material disposed in both the first and second cavities and in contact with the first and second optical components.
4 more elements
An optical device, comprising:
- a substrate;
- a first optical waveguide suspended above a first cavity in the substrate;
- a second optical waveguide suspended above a second cavity in the substrate;
- a reservoir in the substrate;
- a channel of smaller cross-section than the reservoir connecting the reservoir with the first and second cavities;
- and
- a cured filler material disposed in both the first and second cavities and in contact with the first and second optical waveguides,
- wherein a number density of bubbles in the first cavity with a volume of at least 1×10−18 m3 is no more than 1 per 500 μm along a first propagation direction of the first optical waveguide.
5 more elements
A method, comprising:
- disposing a flowable material in a reservoir of a wafer;
- flowing the flowable material to a first cavity in the wafer via a channel, wherein a first optical component is suspended above the first cavity;
- flowing the flowable material to a second cavity in the wafer via the channel, wherein a second optical component is suspended above the second cavity;
- and
- solidifying the flowable material into a filler material in contact with the first optical component.
2 more elements
Dependencies are inferred from the claim text.