Lens array substrate, electro-optical device, electronic apparatus, micro-lens substrate manufacturing method, and electro-optical device manufacturing method

A lens array substrate manufacturing method comprising:

• forming first recess sections on one surface of a light-transmitting substrate;
• forming a second recess section on the one surface of the light-transmitting substrate;
• forming a mark at a bottom of the second recess section;
• forming a plurality of lens surfaces, which includes concave surfaces, at bottoms of the first recess section;
• forming a light-transmitting lens layer on the one surface of the substrate to fill insides of the first recess sections;
• and
• flattening the lens layer by removing the lens layer up to the first recess sections in a depth direction from a side opposite to the substrate, while monitoring a thickness of the lens layer to be removed using the mark as an index, and causing a surface of the lens layer on a side opposite to the substrate to be contiguous with a portion of the one surface of the substrate that is positioned in an outside area that is outside of the first recess sections on the one surface of the substrate such that the surface of the lens layer and the portion of the one surface of the substrate form a planar surface.