Scanning acoustic microscope with an inverted transducer and bubbler functionality
AssigneeNordson Corporation
InventorsLawrence W. Kessler, Thomas Kleinschmidt, Dan Micek
Life of this patent
Estimating the term…
Abstract
A scanning acoustic microscope includes a transducer mounted below a particular elevation and configured to produce ultrasonic energy, a coupling fluid source configured to introduce coupling fluid between the transducer and the particular elevation. Ultrasonic energy is directed upwardly through coupling fluid disposed between and the transducer and a first surface of a part to be inspected, wherein the part is disposed at the particular elevation and wherein a second surface of the part is not contacted by coupling fluid during inspection.
Claims23
A scanning acoustic microscope, comprising:
- a transducer mounted below a particular elevation, the transducer being configured to produce ultrasonic energy;
- and
- a coupling fluid source configured to introduce coupling fluid below the particular elevation, wherein:
- a part to be inspected is disposed at the particular elevation,
- the ultrasonic energy is directed upwardly through the coupling fluid between the transducer and a first surface of the part, and
- a second surface of the part is not contacted by the coupling fluid during inspection.
A scanning acoustic microscope, comprising:
- a transducer disposed below a particular elevation, the transducer being configured to produce ultrasonic energy;
- a coupling fluid source disposed below the particular elevation, the coupling fluid source being configured to introduce coupling fluid below the particular elevation;
- and
- a controller operable to control the coupling fluid source and the transducer such that the coupling fluid from the coupling fluid source is directed upwardly to reach a first portion of a part that is at the particular elevation and not contact a second portion of the part, and the ultrasonic energy from the transducer is directed upwardly through the coupling fluid.
A method of inspecting a part using a scanning acoustic microscope, the method comprising:
- introducing the part at a particular elevation above a transducer configured to produce ultrasonic energy;
- controlling a coupling fluid source to direct coupling fluid upward to at least the particular elevation;
- and
- operating the transducer to direct the ultrasonic energy upward through the coupling fluid to inspect the part,
- wherein, during inspection of the part, the coupling fluid contacts a first portion of the part that is at the particular elevation and does not contact a second portion of the part that is above the particular elevation.
Dependencies are inferred from the claim text.