Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member

A sample observation method for observing a sample by irradiation with a primary charged particle beam of a charged particle beam apparatus that includes a charged particle optical column that irradiates the sample with the primary charged particle beam;

• a light-emitting member that is outside of the sample and disposed on a side of the sample opposite from the charged particle optical column and that transforms the primary charged particle beam transmitted through the sample or scattered in the sample into light and emits the light;
• a sample stage on which a sample support that includes the light-emitting member is detachably arranged, wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support;
• and a detector that detects the light emitted by the light-emitting member, the method comprising:
• a step of irradiating, with the charged particle beam, the sample that is arranged on the light-emitting member, which forms at least a part of the sample support and emits light by charged particles that have been transmitted through or scattered in the sample, directly or via a predetermined member;
• and
• a step of obtaining a charged particle beam microscope image by detecting the light that is emitted by the light-emitting member and is directed to an outside of the sample support.

A sample support to which a sample to be observed by irradiation with a charged particle beam is mounted, comprising:

• a light-emitting member that forms at least a part of the sample support, is outside of the sample and disposed on a side of the sample opposite from a charged particle optical column that irradiates the sample with a primary charged particle beam, and transforms the primary charged particle beam transmitted through or scattered in the sample into light and emits the light,
• wherein the sample support is detachably arranged on a sample stage,
• wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support, and
• wherein the light emitted by the light-emitting member is directed to the outside of the sample support.

An observation system comprising:

• a charged particle optical column that irradiates a sample with a primary charged particle beam;
• a light-emitting member that is disposed on a side of the sample opposite from the charged particle optical column and that transforms the primary charged particle beam transmitted through the sample or scattered in the sample into light and emits the light;
• a sample stage on which a sample support is detachably arranged, the light-emitting member being disposed in a recess in the sample support, such that the light-emitting member is in contact with the sample and the sample support and an upper surface of the light-emitting member is coplanar with an upper surface of the sample support;
• and
• a detector that detects the light emitted by the light-emitting member.

A charged particle beam apparatus comprising:

• a charged particle optical column that irradiates a sample with a primary charged particle beam that is generated by a charged particle beam source;
• a light-emitting member that is disposed outside of the sample and on a side of the sample opposite from the charged particle optical column and that transforms the primary charged particle beam transmitted through the sample or scattered in the sample into light and emits the light;
• a sample stage on which a sample support for placing the sample thereon is arranged, wherein the light-emitting member is disposed between, and in contact with, the sample and the sample support, and the light-emitting member is disposed in a recess in an upper portion of the sample support such that an upper surface of the light-emitting member is coplanar with an upper surface of the sample support;
• a detector that is arranged in a lateral direction of the sample or on a side of the charged particle beam source beyond the sample;
• and
• a control unit that generates a transmission charged particle image of the sample in response to a signal that is detected by the detector.