Inspection apparatus, inspection method, and program
AssigneeKeyence Corporation
InventorHajime Matsuda
Life of this patent
Estimating the term…
Abstract
To facilitate adjusting of a distance from an inspection target to an illumination section by providing a movable illumination section that is movable independently of the imaging section. An illumination apparatus has a plurality of LEDs arranged in a substantially annular form, a light diffusion member for diffusing light emitted from the plurality of LEDs, and a lighting control part for lighting the plurality of light sources in accordance with a predetermined lighting pattern when designated to start lighting. In particular, the illumination apparatus moves independently of a camera to adjust a distance to a workpiece.
Claims6
An inspection apparatus comprising:
- an illumination section which has a plurality of light segments to illuminate the inspection target from three or more illumination directions;
- a processor for controlling the illumination section to light the plurality of light segments;
- an imaging section for capturing a plurality of luminance images of an inspection target;
- an inspection image generating section for obtaining a normal vector of a surface of the inspection target based on the three or more luminance images acquired by the imaging section and generating a shape image based on the normal vector by a photometric stereo method;
- an image selection section for selecting an inspection image out of the plurality of luminance images captured by the imaging section and the shape image generated by the inspection image generating section;
- and
- an inspection tool setting section for setting an inspection tool on the selected image by the image selection section.
Dependencies are inferred from the claim text.