Optical spectrometer configuration including spatially variable filter (SVF)

A system comprising:

• a light source;
• a retention device configured to receive and retain a sample for measurement, wherein the sample includes a silicon device;
• a detector configured to receive reflected light from the sample, wherein the detector generates a signal representing properties of the silicon device detected using the reflected light, wherein an optical path is defined by the light source, the sample when present, and the detector;
• and
• a plurality of spatially variable filters (SVFs) positioned in the optical path, wherein each SVF of the plurality of SVFs is configured to have spectral properties that vary as a function of illuminated position on the SVF.

A system comprising:

• a light source;
• a retention device configured to receive and retain a sample for measurement, wherein the sample includes a silicon device;
• a detector configured to receive reflected light from the sample, wherein the detector generates a signal representing properties of the silicon device detected using the reflected light, wherein an optical path is defined by the light source, the sample when present, and the detector;
• and
• a spatially variable filter (SVF) including a short wave pass component and a long wave pass component, wherein the SVF is positioned in the optical path, wherein the SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.

A method comprising:

• configuring an optical path to couple light between a light source, a sample when present, and a detector, wherein the sample includes a silicon device;
• configuring a spatially variable filter (SVF) to pass light having spectral properties that vary as a function of a position of illumination on the SVF;
• configuring the optical path to include the SVF in at least one position to control properties of at least one of the light and the reflected light;
• and
• configuring the detector to receive reflected light from the sample when present and to generate from the reflected light a signal representing a surface of the sample silicon device when present.

A system comprising:

• a light source;
• a retention device configured to receive and retain a sample for measurement;
• a detector configured to receive reflected light from the sample, wherein the detector generates a signal representing the reflected light, wherein an optical path is defined by the light source, the sample when present, and the detector;
• and
• a spatially variable filter (SVF) positioned in the optical path and configured to have spectral properties that vary as a function of illuminated position on the SVF, wherein the SVF includes a linear variable filter (LVF) comprising a tunable variable pass band filter including a short wave pass component and a long wave pass component.

A system comprising:

• a light source;
• a retention device configured to receive and retain a sample for measurement;
• a detector configured to receive reflected light from the sample, wherein the detector generates a signal representing the reflected light, wherein an optical path is defined by the light source, the sample when present, and the detector;
• and
• a spatially variable filter (SVF) positioned in the optical path, wherein the SVF includes a first SVF component and a second SVF component, wherein the SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.