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US 10,240,953 B2Granted
Housing with a damping element for a micromechanical sensor element
AssigneeRobert Bosch GmbH
InventorUwe Hansen
Life of this patent
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Abstract
A housing for a micromechanical sensor element, including a cavity in which the sensor element is disposable, and a damping element, the micromechanical sensor element being immobilizable in the cavity by the damping element so that the damping element and the sensor element together have a substantially common center of mass.
Claims17
A housing for a micromechanical sensor element, comprising:
- a cavity in which the sensor element is disposable;
- and
- a damping element, wherein the sensor element has a plurality of sides, a top, and a bottom, and is suspended from the cavity in the damping element, the damping element extending from the sides of the sensor element to walls of the cavity, and the sensor element is immobilized in the cavity by the damping element so that the damping element has a center of mass that substantially coincides with a center of mass of the sensor element.
A sensor device, comprising:
- a housing for a micromechanical sensor element, including a cavity in which the sensor element is disposed, and a damping element;
- and
- the micromechanical sensor element, wherein the sensor element has a plurality of sides, a top, and a bottom, and is suspended from the cavity in the damping element, the damping element extending from the sides of the sensor element to walls of the cavity, and the sensor element is situated in the housing so as to be immobilized in the cavity by the damping element so that the damping element has a center of mass that substantially coincides with a center of mass of the sensor element.
A method for manufacturing a sensor device having a micromechanical sensor element, the method comprising:
- constituting a housing having a lead frame, a cavity being constituted in the housing;
- disposing the sensor element in the cavity on the lead frame;
- introducing a gel-like damping material into a space between the sensor element and the housing;
- curing the damping material;
- and
- removing the lead frame beneath the sensor element.
3 more elements
Dependencies are inferred from the claim text.