Apparatus for manufacturing large scale single crystal monolayer of hexagonal boron nitride and method for manufacturing the same
AssigneeKorea Reseach Institute of Standards and Science
InventorChanYong Hwang
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Abstract
A method for manufacturing a large-scale single crystal monolayer of hBN including: preparing a single crystal copper substrate of (111) face in a chemical vapor deposition (CVD) apparatus; removing impurities of the single crystal copper substrate of (111) face; forming a plurality of hBN crystal seeds by depositing a vaporized ammonia borane or a vaporized borazine on the surface of the single crystal copper substrate from which the impurities are removed; and forming a large-scale single crystal monolayer of hBN grown by mutual coherence between the hBN crystal seeds, an apparatus for manufacturing the same, and a substrate for a monolayer UV graphene growth using the same.
Claims6
A method for manufacturing a large-scale single crystal monolayer of hexagonal boron nitride (hBN), comprising:
- preparing a single crystal copper substrate in a chemical vapor deposition (CVD) apparatus, wherein the single crystal copper substrate is formed with a (111) surface;
- removing impurities from the surface of the single crystal copper substrate;
- forming a plurality of hBN crystal seeds by depositing a vaporized ammonia borane or a vaporized borazine on the surface of the single crystal copper substrate such that a crystal direction of the plurality of hBN crystal seeds corresponds to a crystal direction of the surface of the single crystal copper substrate;
- and
- forming the large-scale single crystal monolayer of hBN by mutual coherence between the hBN crystal seeds grown epitaxially,
- wherein distances between the plurality of hBN crystal seeds are adjusted by controlling at least one of an amount of the vaporized ammonia borane, an amount of inert gas and an exposure time, thereby reducing a defect that may be generated in a single crystal of the large-scale single crystal monolayer of hBN and in the mutual coherence between the hBN crystal seeds.
Dependencies are inferred from the claim text.