Method to provide a patterned orientation template for a self-assemblable polymer

A method of preparing a surface of a substrate for deposition of a self-assemblable block copolymer thereon, the method comprising:

• forming a graphoepitaxy template on the surface of the substrate, the graphoepitaxy template configured to align a self-assembled block polymer on the surface of the substrate, wherein the block copolymer is adapted to self-assemble into a 2-D array comprising parallel rows of discontinuous first domains extending parallel to a Cartesian y axis, mutually spaced along an orthogonal Cartesian x axis, and separated by a continuous second domain, the graphoepitaxy template comprising:
• first and second substantially parallel side walls extending parallel to and defining the y axis and mutually spaced along the x axis to provide a compartment adapted to hold at least one row of discontinuous first domains on the substrate between and parallel to the first and second side walls, and separated therefrom by the continuous second domain,
• wherein the compartment comprises a graphoepitaxial nucleation feature arranged to locate at least one of the discontinuous first domains at a specific position within the compartment, the graphoepitaxial nucleation feature comprising (i) a plurality of alcoves in the first side wall and/or second side wall, the alcoves being recesses in a same surface of the first side wall and/or of the second side wall such that portions of the respective first side wall and/or second wall that are substantially parallel to the other of the first side wall and/or second wall extend on opposite sides of at least one of the recesses, or (ii) a buttress extending into the compartment from the first side wall but not reaching the second side wall, or (iii) a pillar within the compartment, extending out from the surface of the substrate and spaced from the first and second side walls, or (iv) a discontinuity between first and second parallel side wall portions of the first sidewall that are offset relative to each other along the x axis, or (v) any combination selected from (i)-(iv).

A method of aligning a self-assembled block polymer on a surface of a substrate, wherein the block copolymer is adapted to self-assemble into a 2-D array comprising parallel rows of discontinuous first domains extending parallel to a Cartesian y axis, mutually spaced along an orthogonal Cartesian x axis, and separated by a continuous second domain, the method comprising:

• providing, on the surface of the substrate, a graphoepitaxy template, the graphoepitaxy template configured to align the self-assembled block polymer on the surface of the substrate, the graphoepitaxy template comprising:
• first and second substantially parallel side walls extending parallel to and defining the y axis and mutually spaced along the x axis to provide a compartment adapted to hold at least one row of discontinuous first domains on the substrate between and parallel to the first and second side walls, and separated therefrom by the continuous second domain,
• wherein the compartment comprises a graphoepitaxial nucleation feature arranged to locate at least one of the discontinuous first domains at a specific position within the compartment, the graphoepitaxial nucleation feature comprising (i) a plurality of alcoves in the first side wall and/or second side wall, the alcoves being recesses in a same surface of the first side wall and/or of the second side wall such that portions of the respective first side wall and/or second wall that are substantially parallel to the other of the first side wall and/or second wall extend on opposite sides of at least one of the recesses, or (ii) a buttress extending into the compartment from the first side wall but not reaching the second side wall, or (iii) a pillar within the compartment, extending out from the surface of the substrate and spaced from the first and second side walls, or (iv) a discontinuity between first and second parallel side wall portions of the first sidewall that are offset relative to each other along the x axis, or (v) any combination selected from (i)-(iv),
• depositing a self-assemblable block polymer composition into the compartment of the graphoepitaxy template, and
• treating the self-assemblable polymer composition to provide self-assembly into the 2-D array of self-assembled block copolymer in the compartment.