Manufacturing method of metal component and manufacturing method of electronic apparatus
AssigneeSeiko Epson Corporation
InventorsTomoyoshi Yamamura, Hiroyuki Sugawara, Satoru Nishimura
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Abstract
This manufacturing method of a metal component enables precision processing of a corner portion, and the radius of curvature of a cog tip of a gear and the like can be made smaller than before. The manufacturing method of a metal component includes: (a) forming a mask film having, in plan view, a first side, a second side, and an extension portion that extends from a region between the first side and the second side on a metal film; and (b) forming a corner portion having, in plan view, a third side and a fourth side by etching the metal film.
Claims6
A manufacturing method of a metal component, comprising;
- (a) forming a first mask film for exposing a first region of a metal film, on the metal film;
- (b) thinning the metal film in the first region by etching the metal film using the first mask film as a mask;
- (c) separating the first mask film from the metal film;
- (d) forming a second mask film, on the metal film, that covers a portion of the first region and exposes a second region within the first region, the second mask film including, in plan view, a first side, a second side, and an extension portion that extends from a region between the first side and the second side, in the first region;
- and
- (e) forming a corner portion including, in plan view, a third side and a fourth side by removing at least the metal film in the second region by etching the metal film using the second mask film as a mask.
Dependencies are inferred from the claim text.