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US 10,240,233 B2Granted
Heating vaporization system and heating vaporization method
AssigneeHORIBA STEC, Co., Ltd.
InventorMasanori Terasaka
Life of this patent
Estimating the term…
Abstract
A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.
Claims8
A heating vaporization system comprising:
- a container that comprises a tank that contains a source and a heating device that heats and vaporizes the source in the tank to produce a source gas;
- a pipe connected to the tank and arranged downstream of the tank through which the source gas from the tank flows;
- a sensor flow path that branches from the pipe and meets the pipe again;
- a flow rate detecting part that comprises a thermal type flow rate sensor provided in the sensor flow path and measures a flow rate of the source gas flowing through the pipe, the thermal type flow rate sensor comprising an upstream side sensor that is coiled around an upstream side of the sensor flow path and a downstream side sensor that is coiled around a downstream side of the sensor flow path;
- a flow rate regulating part that is provided upstream of the flow rate detecting part and downstream of the container, to regulate the flow rate of the source gas flowing through the pipe;
- a control part that uses a flow rate measurement taken by the flow rate detecting part to control the flow rate regulating part;
- one or more heaters arranged in each of the flow rate detecting part and the flow rate regulating part;
- and
- an internal heater arranged inside the pipe located on an upstream side or a downstream side of the flow rate regulating part and adapted to heat the source gas,
- wherein
- the heating device and the one or more heaters are configured to separately control temperatures of the tank, the flow rate detecting part, and the flow rate regulating part,
- the one or more heaters are configured to control a temperature of the flow rate detecting part to be equal to or lower than a temperature of the flow rate regulating part,
- and
- the internal heater includes:
- a hollow metal cylinder of which an outer circumferential surface is configured to fit along an inner circumferential surface of the pipe;
- and
- a metal mesh heating element disposed within the hollow metal cylinder.
14 more elements
A heating vaporization method, comprising:
- heating and vaporizing a liquid source contained inside a container to produce a source gas, and leading the source gas out into a pipe connected to the container;
- providing a sensor flow path that branches from the pipe and meets the pipe again, and measuring via a flow rate detecting part a flow rate of the source gas flowing through the pipe with use of a thermal flow rate sensor provided in the sensor flow path, the thermal type flow rate sensor comprising an upstream side sensor that is coiled around an upstream side of the sensor flow path and a downstream side sensor that is coiled around a downstream side of the sensor flow path;
- regulating the flow rate of the source gas via a flow rate regulating part provided upstream of the flow rate detecting part and downstream of the container, based upon a flow rate measurement taken by the flow rate detecting part;
- heating each of the flow rate detecting part and the flow rate regulating part;
- heating the source gas with an internal heater arranged inside the pipe located between the flow rate regulating part and the flow rate detecting part, wherein the internal heater includes a hollow metal cylinder of which an outer circumferential surface is configured to fit along an inner circumferential surface of the pipe and a metal mesh heating element disposed within the hollow metal cylinder;
- separately controlling temperatures of the container, the flow rate detecting part, and the flow rate regulating part;
- and
- controlling a temperature of the flow rate detecting part to be equal to or lower than a temperature of the flow rate regulating part.
5 more elements
Dependencies are inferred from the claim text.